Piezo

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Nano

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Positioning Ordering Information

Piezo Industrial actuators P-721.CLQ PIFOC
® P-721.CDQ Objective Positioner &Industrial scanner, 100 µm, Capacitive sensor, LEMO Connectors manufacturer, for Quick Lock Thread Adapters Nanopositioning & Scanning Systems PIFOC Active Optics / Steering Mirrors
® Tutorial: Piezo- electrics in Positioning P-721.LLQ Objective Positioner &Scanner, 100 µm, Capacitive Sensor, Sub-D connector, for Quick Lock Thread Adapters PIFOC Capacitive Position sensors
® Piezo Drivers & Nano- positioning controllers P-721.0LQ Objective Positioner &Scanner, 100 µm, LVDT Sensor, LEMO Connectors, for Quick Lock Thread Adapters PIFOC
Quick lock thread adapter P-721.12Qexploded view with microscopeobjective and PIFOC Hexapods / Micropositioning
® P-721.CLQ.Mounting tools are included. Custom PIFOC ® nosepiece nanopositioner for microscope turret. ® Objective Positioner &Scanner, 100 µm, Open-Loop, LEMO Connectors, for Quick Lock Thread Adapters Photonics Alignment Solutions Accessories: Quick Lock AdaptersP-721.11Q Quick Lock Adapter, M25 x 0.75 Motion controllers P-721.12Q Ceramic Linear motors & Stages Quick Lock Adapter, W0.8 x 1/36” P-721.02Q Quick Lock Adapter, M26 x 0.75 Index P-721.03Q Quick Lock Adapter, M27 x 0.75

Technical Data

P-721.04Q Quick Lock Adapter, M28 x 0.75 ModelsP-721.CLQP-721.LLQP-721.0LQUnitsNotes see P-721.CDQp. 2-84 P-721.05Q Max. objective diameter39 3939mm Quick Lock Adapter, M32 x 0.75 Open-loop travel @ 0 to 100 V 90 9090µm ±20%A2Closed-loop travel100 100-µmA5 P-721.06Q Quick Lock Adapter, M26 x 1/36” Integrated feedback sensorCapacitiveLVDT-B P-721.08Q Quick Lock Adapter, M19 x 0.75 * Closed- / open loop resolution 0.7 / 0.510 / 0.5- / 0.5nmC1 Closed-loop linearity (typ.)0.03 0.1-% Full-range repeatability (typ.) ±5 ±20-nmC3 Extension Tubes for ObjectivesP-721.90Q Stiffness0.3 0.30.3N/µm ±20%D1Push/pull force capacity 100 / 20 100 / 20 100 / 20ND3(in operating direction) 12.5 mm Extens. Tube, W0.8 x 1/36” P-721.91Q 12.5 mm Extens. Tube, M25 x 0.75 Tilt (
X ) (typ.)0.5 0.50.5µradE1Tilt ( P-721.92Q
Y ) (typ.)13 1313µradE1 12.5 mm Extens. Tube, M26 x 0.75 Lateral runout (Y) (typ.)100 100100nmE2Electrical capacitance3.0 3.03.0µF ±20%F1 P-721.93Q
*For calibrationinformation see p. 2-8. Resolution of PI piezo nanoposi- tioners is not limit-ed by friction orstiction. The value given is noise equivalent motion with E-503 amplifier.** DynamicOperating Current Coefficient in µA per Hz and µm.Example:Sinusoidal scan of 30 µm at 10 Hz requires approxi- mately 1.2 mAdrive current. 12.5 mm Extens. Tube, M27 x 0.75 ** Dynamic operating 4.2 4.24.2µA/(Hz x µm)F2 P-721.94Q current coefficient (DOCC)Unloaded resonant 580580580Hz ±20%G2frequency 12.5 mm Extens. Tube, M28 x 0.75 P-721.95Q 12.5 mm Extens. Tube, M32 x 0.75 Resonant frequency @ 120 g load250 250250Hz ±20%G3Resonant frequency @ 200 g load190190190Hz ±20%G3 P-721.96Q 12.5 mm Extens. Tube, M26 x 1/36” Operating temperature -20 to 80 -20 to 80 -20 to 80 °CH2 P-721.98Q rangeVoltage connection VLVLVLJ1 12.5 mm Extens. Tube, M19 x 0.75 Ask about custom designs! Sensor connection 2 x CL-J2 Weight (with cables) 240 230220g ±5% Body materialAlAlAlLRecommended driver/controller (codes explainedH, M, FH, EG, C p.2-17)

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