Catalogue Nanopositioning and Piezo Actuators
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Physik Instrumente - 88808, 4356, 2678, 72701, 208373, 2647, 81487, 209050
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Nanopositioning Systems Experience
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PI offers the largest se­lection worldwide of high-bandwidth and high-resolution piezo-nano-positioning systems for scientific and industrial applications, from semi­conductors to precision machining.
The following pages show but a few exam­ples of products which PI has developed in recent years. Most of the sys­tems shown were de­signed for special cus­tomer applications and are not available off the shelf; many other cus­tom systems are subject to non-disclosure agree­ments and cannot be shown at all.
Multi-Axis Systems for Optics, Metrology, Microscopy and Semiconductor Technology
X, Y: 100 Mm, super-invar, capacitive sensors. Active 6-D trajectory control. Sub-nm straightness / flatness. Application: metrology
X, Y: 800 Mm, Z: 200 Mm. Capacitive sensors, active trajectory control 6-axis digital controller. Application: metrology
X, Y: 50 Mm.
Invar, 700 hz resonant frequency, Tilt <5 arcsec
Optics Nanopositioner, Z: 50 Mm. Diam.: 129 x 115 mm; aperture: 75 mm, 3 capacitive sensors Straightness <25 nrad
X, Y: 100 Mm; Z: 5 Mm, stainless steel. Dimensions: 150 x 150 x 37 mm. Differential Eddy current sen­sors. Application: nano-structuring
X, Y: 100 Mm active trajectory con­trol. Sub-nm / sub-Mrad straightness and flatness, 8 industrial actuators, 7 sensors Application: AFM, STM, etc.
X, Y: 100 Mm.
Clear aperture: 75 x 75 mm Height: 20 mm, capacitive sensors Application: optical inspection
X, Y: 100 Mm. Capacitive sensors 1 nm straightness/flatness Application: metrology
X, Y: 100 Mm.
Clear aperture: 50 x 50 mm Capacitive sensors Application: microscopy
X, Y: 100 Mm, capacitive sensors, Height: 16 mm. For microscopy
X, Y: 100 x 100 Mm, 6z ±1 mrad, capacitive sensors
XY-0Z, 200 x 200 Mm, ±2 mrad, capacitive sensors
Systems for Precision Machining
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Tool servo for concentric turning of fiber connectors. XY: 60 x 60 Mm, Eddy current sensors
Tool fine adjustment: X: 60 Mm. LVDT sensor. Application: wear compensation
Tool servo control: 400 pm, Application: non-circular turning of metal parts
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