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| | | Piezo • Nano • Positioning | | |
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| | | Objective Scanners & Mirrors Z/Tip/Tilt Stages XY / XYZ Stages 6-Axis Stages | | |
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| | | Actuators/ Linear Motors | | |
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| | | Piezo Controllers News & Applications | | |
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| | | | | | | | | | | | H | L | | | | P-601.1S | 16,5 | 46,5 | | | | P-601.3S | 18,0 | 64,5 | | | | P-601.4S | 20,5 | 82,5 | | | | | | | | | | |
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| | | P-601 dimensions in mm. | | |
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| | | | | | | | | | | | | | | | | Technical Data | | | | Models | P-601.10 | P-601.1S | P-601.30 | P-601.3S | P-601.40 | P-601.4S | Units | Tolerances | | | | Active Axis | ZZZZZZ | | | | | | Motion and Positioning | | | | Integrated sensor | - | SGS | - | SGS | - | SGS | | | | | | Travel range -20 to +120 V, open-loop | 110 | 110 | 300 | 300 | 480 | 480 | |_im | min. | | | | Travel range closed-loop | - | 100 | - | 250 | - | 400 | |_im | | | | | Resolution open-loop | 0.2 | 0.2 | 0.3 | 0.3 | 0.4 | 0.4 | nm | typ. | | | | Resolution closed-loop | 2 | 2 | 6 | 6 | 12 | 12 | nm | typ. | | | | Linearity | - | 0.1 | - | 0.3 | - | 0.3 | % | typ. | | | | Unidirectional repeatability | - | 8 | - | 10 | - | 30 | nm | typ. | | | | Pitch | 20 | 20 | 20 | 20 | 20 | 20 | |_irad | typ. | | | | Yaw | 10 | 10 | 10 | 10 | 10 | 10 | |_irad | typ. | | | | Mechanical Properties | | | | Stiffness in motion direction | 0.8 | 0.8 | 0.38 | 0.38 | 0.28 | 0.28 | N/|_im | ±20 % | | | | Resonant frequency unloaded | 750 | 750 | 440 | 440 | 350 | 350 | Hz | ±20 % | | | | Resonant frequency loaded (30 g) | 620 | 620 | 350 | 350 | 290 | 290 | Hz | ±20 % | | | | Push-/pull force in motion direction | 30/10 | 30/10 | 20/10 | 20/10 | 15/10 | 15/10 | N | Max. | | | | Lateral force | 30 | 30 | 30 | 30 | 30 | 30 | N | Max. | | | | Drive Properties | | | | Drive type | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | | | | | | Electrical capacitance | 1.5 | 1.5 | 3.1 | 3.1 | 4.6 | 4.6 | MF | ±20 % | | | | DOOC | 1.9 | 1.9 | 1.6 | 1.6 | 1.4 | 1.4 | MMHz x Mm) ±20 % | | | | Miscellaneous | | | | Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C | | | | | Material | Stainless | Stainless | Stainless | Stainless | Stainless | Stainless | | | | | | | Steel | Steel | Steel | Steel | Steel | Steel | | | | | | Mass | 50 | 50 | 75 | 75 | 110 | 110 | g | ±5 % | | | | Cable length | 250 | 250 | 250 | 250 | 250 | 250 | mm | ±10 mm | | | | Sensor connection | Open leads | Open leads | Open leads | Open leads | Open leads | Open leads | | | | | | Voltage connection | Open leads | Open leads | Open leads | Open leads | Open leads | Open leads | | | | | | Recommended driver/controller | E-610, | E-610, | E-610, | E-610.SO, | E-610.SO, | E-610.SO, | | | | | | | E-831 | E-831 | E-831 | E-621 | E-621 | E-621 | | | | | | | | | | | | | | | | | | |
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