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Servo-controller, Motor controller, Cylinder, Electric cylinder, Translation stage
Text version of the page
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Overview
Piezo Scanning S Piezo Motor Stages
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PILine® XY Piezo Linear-Motor Stage
■ Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
■ Travel Ranges 25 x 25 mm
■ Integrated Linear Encoders with 0.1 |_im Resolution
■ Compact Design: 32 mm Profile Height, 170 x 170 mm Footprint
■ Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
■ Self-Locking at Rest
■ Compatible with PI Piezo Nanopositioning / Scanning Stages See p. 24 or Online Datasheet Available at www.pi.ws
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Low-Profile, Z, Z-Tip-Tilt, XY & XYZ Piezo Scanning Microscopy Stages
■ Low Profile for Easy Integration, Large Clear Aperture
■ Higher Speed Direct DriveOption
■ Travel to 200 x 200 |jm x 200 |jm / 2 m rad
■ Frictionless Precision Flexure Guiding System
K
jf ■ Parallel-Kinematics/MetrologyforEnhanced Responsiveness/Multi-Axis Precision
^^^1 . -"^^ ■ PICMA® High-Performance Piezo Actuators for Superior Lifetime
■ Non-Magnetic Scanning Stages for UHV to 10-9 hPa available
See pp. 16-35, or Online Datasheet Available at www.pi.ws
Miniature Low-Profile OEM XY Piezo-Scanners for Imaging Applications
■ Ideal for Interlacing, CCD Resolution Enhancement
■ Compact Size of only 45 x 45 x 6 mm
■ Clear Aperture
■ Highly Cost-Efficient Design
■ 15 x 15 jm Travel Range
■ Parallel-Kinematics Design for Higher Dynamics
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See p. 32 or Online Datasheet Available at www.pi.ws
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PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM
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■ Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
■ Compact Manipulation Tool for Nanotechnology
■ Resonant Frequency 9.8 kHz
■ Ultra-High-Precision Capacitive Feedback
■ 50 Picometers Resolution, 5 x 5 x 5 |m Travel Range
■ Very Small Package, Rugged Design
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See p. 34 or Online Datasheet Available at www.pi.ws
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