Piezo

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Nano

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Positioning

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Industrial position sensors Piezo Drivers & Nano- positioning controllers
Settling behavior of a PILine ® M-663 linear stagewith 100 g load after a 0.1 mm step. With dynamicparameter switching and the high servo rate, the C-865 can reach a stable position to within 0.1 µm (1 encoder count) in only 10 ms. Vertical axisdisplays motion in mm, horizontal axis time inseconds. Hexapods / Micropositioning Photonics Alignment Solutions
C-865.1 dimensions in mm Motion controllers

Technical Data

Ceramic Linear motors & Stages ModelsC-865.1xx FunctionController / Driver for PILine
® Piezomotor Systems Index Axes1 Controller characteristicsProgrammable PID, V-ff filter, on-the-fly parameter change Trajectory profileS-Curve Resolution / output voltage16-bit DAC, 0 to 60 Vrms (C-865.x61) or 0 to 170 Vrms (C-865.x65), at piezomotor MDR14 connector Encoder inputA/B differential signal, 35 x 10
6 Impulse/s, 4 x interpolatedStall detectionStop motor, deactivate servo, when position error exceeds programmable threshhold. Limit switch control2 programmable TTL lines (active high/low)Reference switch1 programmable TTL line (active high/low) Operating voltage 12 V DC, external power supply (included) Operating current190 mA (w/o piezomotor), current limit 1 A Interfaces / communicationUSB 1.1; RS-232, max. 115,200 BaudAnalog and digital I/O connections DB9 Connector Command setPI General Command Set (GCS), see p.9-28 Weight565 g Dimensions185 x 125 x 44 mm

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