Catalogue Micropositioning Actautors and Stages
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Automatic Optics Alignment With the internal or externalphotometer option and the integrated scanning routines, just a few commands are need- ed to perform an automated alignment of optical compo- nents. For more information onphotometers / optical power meters, see the F-206.IRU andF-206.00U, p. 8-12and the F-361, p. 8-14. A smaller, even-more-precisehexapod, specially developed for alignment of collimators, fiber bundles and I/O chips, is available as the F-206 (see p. 7-18and p. 8-8).

Piezo


Nano


Positioning

Open Architecture Control of the M-840 is facilitat-ed by the controller’s open interface architecture, which provides a variety of high-levelcommands and includes amacro language for program- ming and storing command sequences.

Piezo actuators Piezo Actuators Nanopositioning & Scanning Systems Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Tutorial: Piezo- electrics in Positioning Capacitive Position sensors Capacitive Position Sensors Piezo Drivers & Nano- positioning Controllers Piezo Drivers & Nano- positioning Controllers Hexapods / Micropositioning Hexapods / Micropositioning Photonics Alignment Solutions Photonics Alignment Solutions Motion controllers Motion Controllers Ceramic Linear motors & Stages Ceramic Linear Motors & Stages Index Index
M-840 dimensions in mm

Technical Data

ModelsM-840.5PDM-840.5DGUnits * Travel range X, Y±50±50mm * Travel range Z±25±25mm* Travel range
X ,
Y ±15±15° * Travel range
Z ±30±30°Actuator manufacturer stroke±25±25mm
Hexapod Controller with optional built-in display and keyboard. Actuator design resolution0.50.016µm** Minimum incremental motion, X, Y31µm
* The maximum travel rangesin the different coordinatedirections (X, Y, Z, X , Y , Z )are interdependent. Thedata for each axis in thistable shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, theavailable travel may be less.** Six-axis move. No movingcables (unlike serial-kinema- tic stacked systems) tointroduce bending forces,torque and friction which degrade positioning accuracy*** self-locking ** Minimum incremental motion, Z10.5µm** Minimum incremental motion
X ,
Y ,
Z 55µrad Repeatability X, Y±2±2µmRepeatability Z±1±1µm Repeatability
X ,
Y ,
Z ±20±20µradTypical Speed X, Y, Z302mm/s Max. Speed X, Y, Z502.5mm/sTypical Speed
X ,
Y ,
Z 30020mrad/s Max. Speed
High-speed F-361 optical power meter X ,
Y ,
Z 60030mrad/sLoad capacity (mounted vertically)1010***kg Weight1212kg

7-23

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