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Piezo • Nano • Positioning
E-712 Sensor Modules
High-Resolution and Solid for Capacitive and Incrémental Manufacturer of sensors
Ordering Information E-711.SC3H
Module for
Capacitive sensors manufacturer, 3 Channels, for E-712 modular, digital, Controller System
E-711.0CT
Digital transducer Signal Transmission, 3 Channels, Capacitive Sensors, for E-712
Digital control
E-711.SE3
Module for PISeca™ Capacitive Single-Electrode Sensors, 3 Channels, for E-712 modular, digital, Controller System
E-711.SA3
Module for incremental Sensors, 3 Channels, for E-712 modular, digital, Controller System
E-711.SA6
Module for incremental Sensors, 6 Channels, for E-712 modular, digital, Controller System
Ask about custom designs!
■ Flexible Choice of Sensor Analysis, depend on Positioning Mechanic
■ For capacitive Dual- or Single-Plate Sensors or incremental Sensors
■ Resolution of a few Nanometers up to the Sub-Nano Region
■ Up to 6 Channels
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The choice of sensor module depends on the type of sensor used in the
positioning line. For high stability and resolutions in the region of a few nanometers and lower, PI prefers to use 2 types of position sensor: capacitive or incremental ones.
Capacitive Sensors
Pl's proprietary capacitive sen-sors measure position directly and without physical contact. They are free of friction and hysteresis,afactwhich,incom-bination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. Further advantages of direct metrology with capacitive sen-sors is the high phase fidelity and the high bandwidth of up to 10 kHz.
Capacitive sensors can have two configurations: One and two-electrode sensors. PI usu-ally uses two-electrode sensors
in its nanopositioning systems. PlSeca™ one-electrode sensors are available as external sen-sors. Capacitive sensors meas-ure absolute position.
Large Distances between Controller and Stage
An application where the posi-tioning system with capacitive sensors and the controller are more than 3 meters apart re-quires digital, interference-free
transmission of the sensor signal. The sensor evaluation is done in a separate instrument positioned close to the posi-tioning system where the sen-sor signal is digitized with 18-bit resolution and transmit-ted to the controller. This type of transmission works over distances of up to 30 meters, a 10-meter cable is included with the option E-711.0CT.
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Moving the NanoWorld l www.pi.ws