Increased Lifetime ThroughHumidity Resistance The monolithic ceramic-en-capsulated design provides better humidity protection thanpolymer-film insulation. Diffu-sion of water molecules into the insulation layer, is greatly reduced by the use of cofired, outer ceramic encapsulation. High-Level DynamicPerformance—Very WideTemperature Range

PiezoPositioner,PiezoZStage,Z piezostage

The high Curie temperature of320 °C gives PICMA

P-882 – P-888

PICMA

®

High-Performance Monolithic Multilayer Piezo actuators (LVPZT)

Optimum UHV Compatibility— No Outgassing The lack of polymer insulationand the high Curie temperature make for optimal ultra-high- vacuum compatibility (no out-gassing / high bakeout temper-atures, up to 150 °C) Ideal for Closed-LoopOperation Amplifiers, Drivers &Controllers The ceramic surface of theactuators is extremely well suited for use with resistive or optical fiber strain gauge sen- sors. Such sensors can be eas- ily applied to the actuator sur- face and exhibit significantlyhigher stability and linearitythan with conventional poly- mer-insulated actuators. PI offers a wide range of con-trol electronics for piezo actua- tors from low-power drivers to multichannel, closed-loop, digital controllers. Of course, PIalso designs custom amplifiersand controllers.
PICMA ® piezo actuators are currently available with cross-sections of 2 x 3, 3 x 3, 5 x 5 and 10 x 10 mm. Award-Winning Technology
® actuatorsa usable temperature rangeextending up to 150 °C. Thismeans that they can be operat- ed in hotter environments, or they can be driven harder in dynamic operation. With con- ventional multilayer actuators, heat generation—which is pro-portional to operating frequen-cy—either limits the operating frequency or duty cycle in dynamic operation, or makes ungainly cooling provisions necessary.At the low end, operationdown to a few Kelvin is possi- ble (with reduction in perform- ance specifications). Low Operating Voltage Superior Lifetime Even Under Extreme Conditions Very Large Operating-Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness UHV Compatible to 10
-9 hPa Sub-Millisecond Response & Sub-Nanometer Resolution New Production Process,Optimized PZT Ceramics Increased Lifetime and HigherPerformance PICMA PICMA
® (PI Ceramic MonolithicActuator) piezo actuators arecharacterized by their high per- formance and reliability, even in extremely harsh environ-ments. They are superior toconventional multilayer actua- tors in industrial applications and high-endurance situations, where they show substantiallylonger lifetimes both in staticand dynamic operation.
Application Examples

Precision mechanics andmechanical engineering

® piezo actuators aremade from a ceramic materialin which the piezoceramic properties such as stiffness, capacitance, displacement, temperature stability and life- time are optimally combined. The actuators’ monolithicdesign and special electrodestructure was made possible by advances in production technology. This development is just one reflection of the more than 30 years experience PI has with thousands of in-dustrial PZT applications.

Nanopositioning / high- speed switching Active and adaptive optics Vibration cancellation Pneumatic & hydraulic valves Metrology / interferometry

PICMA ® actuator with optional wire leads and rounded top piece for decoupling lateral forces optional.PICMA

Life sciences, medicine and biology

® dimensions, in mm © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 1-12