PL022 · PL033 · PL055

PICMA

Chip Monolithic Multilayer Piezo actuators (LVPZT)

Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Tutorial: Piezo- electrics in Positioning Capacitive Position sensors Piezo Drivers & Nano- positioning controllers PICMA ® Chip actuators are the smallest ceramic-encapsulated multilayer piezoactuators available. Standard cross-sections range from 2 x 2 to 5 x 5 mm. Hexapods / Micropositioning Photonics Alignment Solutions Ceramic Encapsulation for Extended Lifetime Ultra-Compact, from 2 x 2 x 2 mm
Motion controllers High Curie Temperature Optimized PZT Ceramics,Humidity Resistance Ideal for Dynamic Operation
Ceramic Linear motors & Stages Sub-Millisecond Response / Sub-Nanometer Resolution PICMA UHV Compatible to 10
-9 hPa Optimum UHV Compatibility— No Outgassing
Index Superior Lifetime The lack of polymer insulationand the high Curie tempera- ture make for optimal ultra-high-vacuum compatibility (nooutgassing / high bakeout tem- peratures of up to 150 °C). Ultra-Compact MonolithicPiezo Actuators Long Lifetime and HighPerformance—Ideal for Dynamic Operation Amplifiers, Drivers &Controllers PICMA PICMA
® Chip actuators are thesmallest monolithic multilayer piezo actuators available. Providing sub-nanometer reso- lution and sub-millisecond response, they are ideally suited to high-level dynamicapplications. PICMA
® actuators are madefrom a ceramic material in which the piezoceramic prop- erties such as stiffness, capaci- tance, displacement, tempera- ture stability and lifetime areoptimally combined. Themonolithic, ceramic-encapsu- lated design provides better humidity protection than poly- mer-film insulation. PI offers a wide range of con-trol electronics for piezo actua- tors from low-power drivers to multi-channel, closed-loop, digital controllers. Of course,PI also designs custom ampli-fiers and controllers.
® actuatorsconsist of a highly reliable ceramic-encapsulated PZT block with solderable termina- tions, and come in standard sizes as small as 2 x 2 x 2 mm.
® Chip actuators aresuperior to conventional actua- tors in high-endurance situa-tions, where they show sub-stantially longer lifetimes both in static and dynamic opera- tion, even in harsh environ- ments. Due to their high reso- nant frequency, these actua- tors are ideally suited for dynamic operation with light loads; an external preload isrecommended for dynamicoperation with larger loads. The high Curie temperature of 320 °C provides a usable tem- perature range extending up to 150 °C, well above the 80 °C limit of conventional multilayeractuators. At the low end, ope-ration down to a few Kelvin is possible (with reduction in per- formance specifications).
Dimensions in mm. Application Examples

Static and dynamicnanopositioning

Technical Data / Product Order Numbers Recommended preload for dynamic operation 15 to 30 MPa Max. operating voltage: -20 to +100 V Max. operating temperature: 150°C Standard Mechanical Interface: ceramic (top & bottom)Standard Electrical Interface: solderable termination Available Options: special mechanical interfaces, etc.Other specifications on request.

Laser tuning

Order Dimensions Displacement Blocking Electrical Resonant

Micro-dispensing

number*A x B x TH [µm @ 100 V]force capacitancefrequency in mm±20%[N][nF] ±20%[kHz]

Interferometry

PL022.302 x 2 x 22.2> 25025> 300 PL033.303 x 3 x 22.2> 30050> 300 PL055.305 x 5 x 22.2> 500250> 300

Life sciences Photonics

* For optional wire leads change order number extension to .x1 (e.g. PL022.31)Resonant frequency measured at 1 V © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 pp , capacitance measured at 1 V pp , 1 kHz. 1-11