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M-014
Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings
All stages can be cross stacked and combined with the M-053.10 (manual versions) and M-053.20 (motorized ver­sions) Z-axis mounting bracket to provide multi-axis motion. Vertical use of the M-014 is only permitted with loads less than 0.5 kg. For vertical posi­tioning with loads in excess of 0.5 kg we recommend M-126 stages (see page 7-40) and the 125.90 Z-axis mounting brack­et.
Upgrades
M-014 stages without PZT or Dc motor drives can be upgraded at a later date (see ordering information).
Notes
See "Accessories", page 7-92 ff. for adapters, brackets, etc.
Ordering Information M-014.00
Translation stage, 25 mm M-014.P0
Translation Stage, 25 mm, Manual + PZT Drive
M-014.PS
Translation Stage, 25 mm, Manual + Closed-Loop PZT Drive
M-014.D01
Translation Stage, 25 mm,
DC-Motor Drive
M-014.DP1
Translation Stage, 25 mm,
DC-Motor + PZT Drive
M-014.DS1
Translation Stage, 25 mm,
DC-Motor + Closed-Loop PZT Drive
Upgrades M-014.U0
Upgrade Kit with Open-Loop
PZT Drive
M-014.US
Upgrade Kit with Closed-Loop
PZT Drive
M-014.UD
Upgrade Kit with DC-Motor Drive and Limit Switches (Factory Installed)
Ask about custom designs!
■ Travel Range 25 mm
■ Compact Side Drive
■ Straightness/Flatness < 0.3 pm
■ PZT Drive for Scanning and Tracking Applications
■ 0.1 pm Resolution w/ Closed-Loop DC Motor
■ 5 nm Resolution with Closed-Loop PZT Drive
■ 30 mm 0 Clear Aperture
M-014 ultra-high-precision magnetically coupled stages use the force of integrated magnets to preload the bear­ing. This magnetic preload results in extremely uniform and smooth motion with mini­mum friction. Unlike conven­tional stages, where two bear­ings with limited parallelism guide the carriage (inducing runout and rotational errors) in M-014 stages, only one of the two linear bearings has a guid­ing function (V-groove) while the second bearing is for sup­port only (U-groove).
on-axis forces (drive direction) to be transmitted to the stage; torque-induced positioning errors induced by non-paral­lelism between the drive axis and the guiding axis are elimi­nated.
Six Different Versions
The basic version, the M-014.00, is equipped with a precision manual micrometer providing a sensitivity of 1 urn. M-014.D01 is equipped with a closed-loop DC-motor drive providing 0.1 um minimum incremental motion.
Ultra-Straight Motion
The coupling between the stage and the space-saving side drive units (DC-motor drives, PZTs, micrometer drives) is not rigid but via mag­nets. This design allows only
High-Resolution Piezo Option
For both the manual and motorized version, closed-loop and open-loop piezo drives are available. They provide 5 nm minimum incremental motion over a travel range of 45 urn and allow for dynamic opera­tion such as scanning and tracking. The closed-loop piezo drive provides repeatability of 90 nm (see the "Piezo Actuators" section for further details on piezo actuators and recommended controllers).
Application Examples
C
■ Quality control
r.
_ 7-34
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