Catalogues - complete-pi-nanopositioning-micropositioning-catalog

Catalogue Complete PI Nanopositioning & Micropositioning Catalog

www.pi.ws

Page

/ 565

Contact the
Manufacturer

Where to buy
this product ?

Request
a Quote

Physik Instrumente - 5858, 3508, 208373, 2327, 2647, 2148

/ 565

See other catalogues for Physik Instrumente

Text version of the page

M-014

Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

All stages can be cross stacked and combined with the M-053.10 (manual versions) and M-053.20 (motorized versions) Z-axis mounting bracket to provide multi-axis motion. Vertical use of the M-014 is only permitted with loads less than 0.5 kg. For vertical positioning with loads in excess of 0.5 kg we recommend M-126 stages (see page 7-40) and the 125.90 Z-axis mounting bracket.

Upgrades

M-014 stages without PZT or Dc motor drives can be upgraded at a later date (see ordering information).

Notes

See "Accessories", page 7-92 ff. for adapters, brackets, etc.

Ordering Information M-014.00

Translation stage, 25 mm M-014.P0

Translation Stage, 25 mm, Manual + PZT Drive

M-014.PS

Translation Stage, 25 mm, Manual + Closed-Loop PZT Drive

M-014.D01

Translation Stage, 25 mm,

DC-Motor Drive

M-014.DP1

Translation Stage, 25 mm,

DC-Motor + PZT Drive

M-014.DS1

Translation Stage, 25 mm,

DC-Motor + Closed-Loop PZT Drive

Upgrades M-014.U0

Upgrade Kit with Open-Loop

PZT Drive

M-014.US

Upgrade Kit with Closed-Loop

PZT Drive

M-014.UD

Upgrade Kit with DC-Motor Drive and Limit Switches (Factory Installed)

Ask about custom designs!

■ Travel Range 25 mm

■ Compact Side Drive

■ Straightness/Flatness < 0.3 pm

■ PZT Drive for Scanning and Tracking Applications

■ 0.1 pm Resolution w/ Closed-Loop DC Motor

■ 5 nm Resolution with Closed-Loop PZT Drive

■ 30 mm 0 Clear Aperture

M-014 ultra-high-precision magnetically coupled stages use the force of integrated magnets to preload the bearing. This magnetic preload results in extremely uniform and smooth motion with minimum friction. Unlike conventional stages, where two bearings with limited parallelism guide the carriage (inducing runout and rotational errors) in M-014 stages, only one of the two linear bearings has a guiding function (V-groove) while the second bearing is for support only (U-groove).

on-axis forces (drive direction) to be transmitted to the stage; torque-induced positioning errors induced by non-parallelism between the drive axis and the guiding axis are eliminated.

Six Different Versions

The basic version, the M-014.00, is equipped with a precision manual micrometer providing a sensitivity of 1 urn. M-014.D01 is equipped with a closed-loop DC-motor drive providing 0.1 um minimum incremental motion.

Ultra-Straight Motion

The coupling between the stage and the space-saving side drive units (DC-motor drives, PZTs, micrometer drives) is not rigid but via magnets. This design allows only

High-Resolution Piezo Option

For both the manual and motorized version, closed-loop and open-loop piezo drives are available. They provide 5 nm minimum incremental motion over a travel range of 45 urn and allow for dynamic operation such as scanning and tracking. The closed-loop piezo drive provides repeatability of 90 nm (see the "Piezo Actuators" section for further details on piezo actuators and recommended controllers).

Application Examples

■ Microscopy

■ Quality control

■ Metrology

_ 7-34