Contents

Hexapods / Micropositioning

See p. 7-17 a - 7-17 p

Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2Micropositioning / Hexapod Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4Micropositioning Systems, Experience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6Selection Guide Hexapods, Translation Stages, Rotation stages, Vertical Stages . .7-8 Micropositioning Fundamentals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-11

for 2006 NEWS

Micropositioning or Nanopositioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-11Testing Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-11Definition of Axes and Angles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-12Glossary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-12Guiding Techniques . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-15Motors and Drive Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16 Hexapods F-206.S HexAlign™ 6-Axis Precision Alignment system / Industrial manipulator (Hexapod) . . .7-18M-850 Hexapod 6-Axis-Parallel Kinematics Microrobot . . . . . . . . . . . . . . . . . . . . . .7-20M-840 HexaLight™ 6-Axis-Parallel Kinematics Microrobot . . . . . . . . . . . . . . . . . . . .7-22M-824 Compact 6-Axis Parallel Kinematics Microrobot . . . . . . . . . . . . . . . . . . . . . .7-24 Voice Coil Industrial scanners V-106 Voice-Coil Scanning System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-26 Micro-Stages, to 25 mm Travel (Motorized / Manual, Piezo Option) M-311 - M-318 Series of Miniature Translation Stages . . . . . . . . . . . . . . . . . . . . . . .7-28M-105, M-106 Translation Stages with Crossed Roller Bearings . . . . . . . . . . . . . . . .7-30 M-011 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings . . .7-32 M-014 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings . . .7-34M-110.1, M-111.1, M-112.1 High-Resolution Micro-Translation Stages . . . . . . . . . . .7-36M-110.2, M-111.2, M-112.2 High-Resolution Micro-Translation Stages with Ballscrew Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-38M-126 Translation Stages with Crossed Roller Bearings . . . . . . . . . . . . . . . . . . . . . .7-40 Piezo Linear motors, Actuators & Micro-Stages with Piezomotor Drives N-110 NEXLINE
® Miniature High-Load Piezo Nanopositioning Drive . . . . . . . . . . .10-10N-214, N-215 NEXLINE
® High-Load Piezo Nanopositioning Drive . . . . . . . . . . . . . .10-12P-661 PILine
® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs . . .10-14M-661, M-662 PILine
® Miniature Translation Stages with Ultrasonic Motors . . . . .10-16M-663 PILine
® Miniature Translation Stageswith Closed-Loop Ultrasonic Piezo Linear Motors . . . . . . . . . . . . . . . . . . . . . . . . . .10-18M-665 PILine
® Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors . . . . . . . . . . . . . . . . . . . . . . . . . .10-20 Motorized Translation Stages, to 306 mm Travel M-403 High-Resolution Translation Stages with Stepper and Dc motor Drives . . . .7-42 M-405,M-410,M-415 High-Precision Translation Stages with Crossed Roller Bearings . .7-44 M-605 Ultra-Compact, High-Accuracy Translation Stages . . . . . . . . . . . . . . . . . . . . .7-46 M-505 Low-Profile Translation Stages with Ballscrew Drives . . . . . . . . . . . . . . . . . .7-48M-511, M-521, M-531 Low-Profile, High-Load Translation Stages with Ballscrew Drives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-50M-511.5i, M-521.5i, M-531.5i PIIntelliStages™ . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-54
© PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 7-2