Piezo

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Nano

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Positioning

Semiconductor Technology Biotechnology, Life Science, ... Microscopy Data Storage Technology Nanotechnology, Automation, ... Aeronautics, Image Processing Astronomy, Adaptive Optics Metrology / Laser-Systems / ... Precision Machining (Diamond Turning)
Photonics, Telecom, Integrated Optics ApplicationPI SolutionTypical PI Products*
P-628, p. 2-40P-239, p. 1-40P-783, p. 2-44P-587, p. 2-82 N-214, p. 10-12 Nano alignment systems with longtravel rangesBeam scanning and stabilizationOptical path correction Lever-amplified piezo drives with up to 6 axesNEXLINE
® nano drives
ff. S-334, p. 3-20S-340, p. 3-24 Custom high-resolution systems, p. 3-6 Tip/tilt mirror systems Active optics
P-246, p. 1-42P-247, p. 1-42 High-performance ceramics, p. 1-18 ff. Active vibration cancellation Piezo stack actuators and ceramics High-resolutionmicroscopy See examples on p. A-17
P-541, p. 2-48P-528, p. 2-52 P-587, p. 2-82 NEXLINE Piezo Z-stages, standard and custom stages with piezo linearmotors Vertical wafer positioning
® piezo linear motors, p. 10-6 ff .Custom stages, p. 2-10 ff . M-500, p. 7-50PIIntelliStages™, p. 7-54M-038, p. 7-68M-062, p. 7-70 N-214, p. 10-12 P-661, p. 10-14 Motorized translation stagesMotorized rotation stagesPILine Long-range placement and positioning
® ultrasonic motorsNEXLINE
® Piezo-Walk
® motors
* Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer or visit www.pi.ws.

A-15