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Applications Semiconductor Technology * Other standard or customsolutions from PI could be
even more suitable foryour application.Talk to a PI Applications
Engineer or visit
www.pi.ws. ApplicationPI SolutionTypical PI Products* NanoimprintCD testing
Mask and wafer alignment
Objective precision positioningLithographyWafer inspectionNanometrology NEXLINE ® nano drivesXYZ N-214, p. 10-12P-587, p. 2-82, P-734, p. 2-68
P-563, p. 2-80P-750, p. 2-34Custom stages, p. 2-10 X Y Z piezo nanopositioning stages Piezo actuators PIFOC ff. ® nanofocusing devices See examples on p. A-22 Interferometry Closed-loop piezo actuators and flexure-guided systems S-303, p. 3-12P-753, p. 2-26
P-752, p. 2-28
P-620, p. 2-40 Wire bonding Piezo bender actuatorsDisk translators PL-140, p. 1-14P-288, p. 1-28 Sub-nm measurements(Nanometrology) Capacitive position sensors D-100, p. 5-4Custom sensors M-824, p. 7-24
M-850, p. 7-20
F-206, p. 8-8 Optics test bench Hexapod 6D micropositioning system © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 A-14
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