Test and Quality Control
The development of products with nanometer accuracy requires highly qualified personnel and an extensivearray of test equipment. Here is a partial list of the technologies and equipment employed by PI: Nanometrology lab with multiplethermal, acoustic and seismic isola-
tion for reproducible measurements
in the sub-nanometer range Laser
interferometer with a large
variety of special optics for 1-D to 6-D measurements >
Video inspection system for piezo actuatorproduction. Laser scanning vibrometer for
vibration measurements Capacitive position measuring sys-
tem with sub-nanometer resolution Surface analysis interferometer for
sub-nanometer flatness measurement Electronic autocollimators >
Special microscope. Computer-controlled
environmental chambers Spectrum analyzers Coordinate measurement machines
(CMM) Special
industrial microscopes >
Interferometer and precision optics for sub-nanometer and submicroradian measure-
ments.
View of one of PI's six-fold-isolated metrology labs.
Test of a 6D-Hexapod microrobot withan autocollimator.
Component tolerance test. © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 A-12