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| | | Moving the NanoWorld_ijiuww.pi.uus ~i | | |
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| | | P-732.ZC High-Dynamics Vertical Nanopositioning/Scanning Stage | | |
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| | | Superior Lifetime Reliability is assured by the use of award-winning PICMA® multilayer piezo actuators, which are integrated into a sophisticated, single-module, flexure guiding system. PICMA® actuators are the only ceramic-encapsulated actuators on the market, making them far superior to conventional actuators in lifetime and performance. The FEA-modeled flexures are wire-EDM-cut for superior guiding precision. In addition they are maintenance-free and not subject to wear. | | |
| | | Ordering Information | | |
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| | | P-732.ZC High-Dynamics Vertical Nanopositioning Scanning Stage, 12 |jm, Capacitive Sensor | | |
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| | | ■ High Stiffness for High-Dynamics Operation ■ Up to 15 urn Vertical Travel Range ■ <1 nm Resolution ■ Straightness of travel <10 jrad ■ Clear Aperture with 25 mm Diameter | | |
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| | | The P-732.ZC is a fast, high-resolution vertical positioning stage with direct metrology. Providing subnanometer resolution, less than 2 milliseconds settling time and a straightness of motion of better than 10 urad, the stage is ideally suited for scanning microscopy applications. In combination with the P-733 100 x 100 um Xy stage (see page 2-66) it becomes a compact XYZ positioning and scanning stage with excellent dynamic performance in the vertical direction. | | Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors P-732.ZCs are equipped with non-contact, zero-friction, direct-measuring, two-plate capacitve position sensors. Unlike conventional, indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator or guiding system. Capacitive sensors are absolute-measuring, high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01 % and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensors and the temperature-compensated design, results in higher-linearity scans, and provides superior responsiveness, resolution, repeatability and stability. | | |
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| | | Application Examples | | |
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| | | ■ Scanning microscopy ■ Scanning interferometry ■ Surface structure analysis ■ Confocal microscopy ■ Biotechnology | | |
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