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| | | Piezo • Nano • Positioning | | |
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| | | ometer Precision Measurements | | |
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| | | D-510.020 PISeca™ Single-Electrode Capacitive sensor Probe, 8 mm diameter, 20 |jm nominal range D-510.050 PISeca™ Single-Electrode Capacitive Sensor Probe, 12 mm diameter, 50 |jm nominal range D-510.100 PISeca™ Single-Electrode Capacitive Sensor Probe, 20 mm diameter, 100 |m nominal range Ask about custom designs! | | |
| | | ■ Semiconductor technology / test & measurement ■ Data storage ■ Automotive industry ■ Precision machining | | |
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| | | ■ Non-Contact Measurement for Distance / Motion / Vibration ■ Absolute Position Sensing ■ Sub-Nanometer Resolution ■ Measurement Ranges to 500 urn ■ Easy Integration ■ High Bandwidth | | |
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| | | D-510.020, D-510.050 and D-510.100 capacitive sensor probes, dimensions in mm. Sensor connection LEMO FFC00.650.CLA.543, triaxial, cable length 1 m | | |
| | | | | | | | | | | | | | | | | | | | | Technical Data | | | | | | | | | D-510.020 | D-510.050 | D-510.100 | Unit | | | | Sensor type | Single-electrode, capacitive | Single-electrode, capacitive | Single-electrode, capacitive | | | | | | | | Measurement accuracy | | | | | | | | Nominal measurement range* | 20 | 50 | 100 | |m | | | | Min. gap | 10 | 25 | 50 | |m | | | | Max. gap | 150 | 375 | 750 | |m | | | | Static resolution** | <0.001 | <0.001 | <0.001 | % of measurement range | | | | Dynamic resolution** | <0.002 | <0.002 | <0.002 | % of measurement range | | | | Linearity*** | <0.2 | <0.1 | <0.1 | % | | | | Mechanical properties | | | | Sensor active diameter | 3.8 | 6 | 8.4 | mm | | | | Sensor active area | 11.2 | 27.9 | 56.1 | mm2 | | | | Sensor diameter | 8 | 12 | 20 | mm | | | | Sensor area | 50.3 | 113.1 | 314.0 | mm2 | | | | Mounting shaft diameter | 8 | 8 | 8 | mm | | | | Miscellaneous | | | | Operating temperature range | -20 to +100 | -20 to +100 | -20 to +100 °C | | | | Material | Stainless steel | Stainless steel | Stainless steel | | | | Mass | 8 | 10 | 16 | g | | | | | E-852.10 | E-852.10 | E-852.10 | | | | | | | | | | | | | |
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| | | * Extended measurement ranges available for calibration with E-852 signal conditioner electronics ** Static resolution: bandwidth 10 Hz, dynamic: bandwidth 6.6 kHz, with E-852.10 signal conditioner electronics *** Linearity over nominal measurement range | | |
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