| | | Vibration, Flatness, Thickness The high dynamics of the PISeca™ capacitive gauge system even allows measurements of vibrations and oscillations with excellent resolution. Flatness of a rotating work-piece or differences in thickness in the nanometer range can be detected. One field of application is in the production of disk drives or in active compensation of vibration. | | Single-electrode capacitive sensors, which measure sub-nanometer displacement from a distance with no contact, are frequently used as high-resolution force sensors. In a system having suitably well-defined stiffness, the measured displacements translate to forces with resolutions in the micronewton range, all without influencing the process being measured. | | Layer Thickness with Sub-Micron Accuracy Measuring the thickness of a film or layer of non-conducting material on a moving, conductive, surface (e.g. a rotating drum) is an ideal job for capacitive sensors due to their noncontact operation and their high dynamic performance. | | |