Catalogue Capacitive Position Sensors Capacitive position sensors (capacitance sensors) provide position resolutions to 0.01 nanometer. Ideal for nanometrology applications ...
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Physik Instrumente - 4957, 81215, 4090, 14776
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Piezo • Nano • Positioning
Function, Properties, Advantages
D-510.050 with LEMO connector for easy handling
Ideal for Closed-Loop Piezo Nanopositioning
Closed-loop nanopositioning systems may be controlled by sensor/ servo-controller mod­ules of PI's E-500 series. Such modules are available for con­necting up to three industrial position sensors, either stand-alone or integrated into the motion sys­tem. Closed-loop operation eliminates the drift and hys­teresis that otherwise affect piezo actuators.
For nanopositioning tasks with the most stringent accuracy requirements PI offers high­end digital controllers.
Accuracy
Accuracy, linearity, resolution, stability and bandwidth are far better than with conventional nanometrology sensors like LVDT or strain gauge sensors.
Non-contact operation means no parasitic forces influencing the application and results in measurement free of friction and hysteresis.
Guard-Ring Design for Improved Linearity
Sensor design has a strong influence on linearity. The superior PI design uses a guard-ring industrial electrode that elimi­nates sensor electrode bound­ary effects. This ensures a homogenous field in the meas­urement zone and results in higher measuring linearity.
Single- and Multi-Channel Electronics
PI's signal conditioner electron­ics are specially designed for
high bandwidth, linearity and ultra-low noise and are perfect­ly matched to the various PI sensor probes. PI offers signal conditioner electronics and controllers for one to three channels. The E-509 multi­channel modules plug into the modular E-500 / E-501 con­troller chassis. Bandwidth and measurement range can be fac­tory-set to meet the specific needs of each application. The E-852 one-channel signal con­ditioner electronics for PISeca™ single-plate sensors are de­signed as stand-alone systems with user-selectable bandwidth and range setting and can be synchronized to operate in multi-channel applications.
Easy Handling and Integration
PISeca™ single-electrode sen­sors are particularly easy to install in a measurement sys­tem. On the single-channel electronics, an LED-bar indi­cates the optimum probe-to­target gap for the different measurement range settings. The multi-channel electronics come optionally with displays and/or a PC interface on a mod­ule in the same housing.
Higher Linearity through ILS Electronics
All of PI's signal conditioning electronics are equipped with the PI proprietary ILS lineariza­tion circuit that minimizes non-parallelism errors.
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