Piezo
•
Nano
•
Positioning
Piezo-Aktoren
Piezo actuators Nanopositioning &
Scanning Systems Piezo-Strahlsteuerung Active Optics / Steering Mirrors Tutorial: Piezo-electrics in Positioning Capacitive
Position sensors Piezo Drivers & Nano-
positioning controllers Hexapods /
Micropositioning Photonics Alignment
Solutions
Motion controllers Ceramic
Linear motors & Stages Index
Technical Data
ModelsS-340.x0S-340.xLUnitsNotes see page 3-26 Active axes
X ,
Y X ,
Y * Open-loop tilt angle 0 to 100 V 2 (4 optical)2 (4 optical)mrad ±20%A2* Closed-loop tilt angle -2 (4 optical)mrad A3 Integrated feedback sensor-4 x LVDTB ** Closed-loop / open-loop resolution - / 0.10.5 / 0.1µradC1 Closed-loop linearity (typ.)-±0.1%
Full-range repeatability (typ.)-±1µradC3
* Mechanical tilt, opticalbeam deflection is twice as large.** For calibration informationsee p. 3-7.
Resolution of PZT tip/tilt
platforms is not limited by
friction or stiction. Noiseequivalent motion with E-503 amplifier. *** Dynamic OperatingCurrent Coefficient in µAper hHz and µrad. Example: Sinusoidal scan
of 100 µrad at 10 Hz requires approximately
0.38 mA drive current.**** Value for aluminum topplate. Lower resonant fre-quency for other platforms
due to higher moment of
inertia: titanium: +60%;
invar: +200%; steel: +190%. Electrical capacitance 6.0 / axis 6.0 / axisµF ±20%F1*** Dynamic operating 0.38 / axis 0.38 / axisµA/(Hz x µrad)F2current coefficient (DOCC) **** Unloaded resonant frequency (f
)1.41.4kHz ±20%G2**** Resonant frequency 0.90.9kHz ±20%G3w/ ø 50 x 15 mm glass mirror **** Resonant frequency 0.40.4kHz ±20%G3 w/ ø 75 x 22 mm glass mirrorDistance, pivot point to platform surface (T)7.57.5mm **** Platform moment of inertia1800018000g · mm
2 Operating temperature range- 20 to 80- 20 to 80°CH2 Voltage connection 3 x VL3 x VL J1Sensor connection -2 x L J2 Weight (w/o cables)335335g ±5%Material (case / platform)Al / depends Al / depends Lon versionon version Recommended amplifier/controllerG
# , CH
# , E
# With (1 x E-505.00S + 2 x E-505.00) or 1 x E-503.00S
S-340 dimensions (in mm) (codes explained page3-9)
3-25