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Catalogue Active Optics / Steering Mirrors High-Dynamics Steering Mirrors

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Piezo • Nano • Positioning

integrated, FEA-modeled (finite element analysis) circular flexure featuring zero stiction, zero friction and exceptional guiding precision.

Since drives and guides are frictionless and not subject to wear and tear, these units offer

an exceptionally high level of reliability.

Notes

See the "Selection Guide" on p. 3-8 for comparison with other steering mirrors. See the "Piezo Drivers & Nano-positioning controllers" sec-

tion for our comprehensive line of low-noise modular and OEM control electronics for computer and manual control.

Piezo Actuators

Nanopositioning & Scanning Systems

Active Optics / Steering Mirrors

Tutorial: Piezo-electrics in Positioning

Capacitive Position sensors

Piezo Drivers & Nano-positioning Controllers

Hexapods/ Micropositioning

Photonics Alignment Solutions

Motion controllers

Ceramic Linear motors & Stages

Index


Technical Data
Models	S-330.30	S-330.2SL	Units	Notes see page 3-26
Active axes	©X/ ©Y	©X/ ©Y
Open-loop tilt angle @ 0 to 100 V	2*	2*	mrad ±20%	A2
Closed-loop tilt angle	-	2*	mrad	A3
Integrated feedback sensor	-	4 x strain gauge		B
** Closed-loop / open-loop resolution	- / 0.05	0.1 / 0.05	urad	C1
Closed-loop linearity (typ.)	-	±0.2	%
Full-range repeatability (typ.)	-	±2	urad	C3
Electrical capacitance	3.0 / axis	3.0 / axis	uF ±20%	F1
*** Dynamic operating	0.2 / axis	0.2 / axis	uA/(Hz x urad)	F2
current coefficient (DOCC)
Resonant frequency (f₀) without mirror	3.3	3.3	kHz ±20%	G2
Resonant frequency	2.4	2.4	kHz ±20%	G3
w/ 0 25 x 8 mm glass mirror
Distance, pivot point to platform surface (T)	6	6	mm
Platform moment of inertia	1530	1530	g • mm²
Operating temperature range	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	3 x VL	3 x VL		J1
Sensor connection	-	2 x L, 2 m cable		J2
Weight (w/o cables)	200	200	g ±5%
Material (case / platform)	N-S / I	N-S / I		L
Recommended amplifier / controller	G», C	H», D
(codes explained page 3-9)

* Mechanical tilt, optical beam deflection is twice as large. Special version with 10 mrad available on request.

** For calibration information see p. 3-7.

Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier. *** Dynamic Operating Current Coefficient in mA per Hz and Mrad. Example: Sinusoidal scan of 100 Mrad at 10 Hz requires approximately 0.2 mA drive current.

# With (1 x E-505.00S + 2 x E-505.00) or 1 x E-503.00S

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