Piezo

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Nano

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Positioning

Piezo-Aktoren Piezoaktoren Piezo actuators Piezo-Nano- positioniersysteme Nanopositioning & Scanning Systems Piezo-Strahlsteuerung Aktive Optik /Piezokippspiegel Active Optics / Steering Mirrors Tutorium: Nanoposi-tionieren mit Piezos Tutorial: Piezo-electrics in Positioning Kapazitive Sensoren Capacitive Industrial position sensors Piezoelektronik Piezo Drivers & Nano- positioning controllers
S-334.2SL cable configuration Hexapoden / Mikropositionierung Hexapods / Micropositioning

Technical Data

ModelsS-334.2SLUnitsNotes see Photonics Alignment Solutions page 3-26 Faserpositionierung Active Axes
X ,
Y * Open-loop tilt angle @ 0 to 100 V50 mrad ±20%A2* Closed-loop tilt angle50 mradA3 Motorsteuerungen Industrial motion controllers Piezomotoren / Stelltische Ceramic Linear motors & Stages Integrated feedback sensor4 x full-bridge B strain gauge sensors** Closed-loop / open-loop angular resolution<5 / 0.5 µradC1 Index Index Closed-loop linearity (typ.)±0.25% Electrical capacitance3.0 / axis µF ±20%F1 Resonant frequency with 10 mm diam. x 2 mm glass mirror1.0 kHz ±20%G2Resonant frequency with 12.5 mm diam. x 2.5 mm glass mirror0.8 kHz ±20%G3 Distance of pivot point to platform surface (lower mirror surface)2 ±0.5 mm Operating temperature range-20 to 80 °CH2 Voltage connection3 x LEMO FFA.00.250, 2 mSensor connection2 x LEMO FFA.0S.304, 2 m
* Mechanical tilt, optical beamdeflection is 100 mrad.** For calibration informationsee p. 3-7. Resolution of PI piezo tip/tilt platforms is not limited byfriction or stiction. Noiseequivalent motion with E-503 amplifier. Weight (without cables)65 g ±5%Standard mirrordiameter: 10 mm, thickness: 2 mm, BK7, / 5, R >98% ( = 500 nm to 2 µm) Material casingTitaniumLRecommended amplifier/controller H
# , D(codes explain page 3-9)
# With (1 x E-505.00S + 2 x E-505.00) or 1 x E-503.00S

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