Piezo

•

Nano

•

Positioning

Notes See the “Selection Guide” on p. 3-8for comparison with other steering mirrors.See “Piezo Drivers & Nano-positioning controllers” sec- tion for our comprehensive line of low-noise modular and OEM control electronics for comput- er and manual control.

Piezo-Aktoren Piezo actuators Piezo-Nano- positioniersysteme Nanopositioning & Scanning Systems Piezo-Strahlsteuerung Active Optics / Steering Mirrors Tutorium: Nano-positionieren mit Piezos Tutorial: Piezo-electrics in Positioning Kapazitive Sensoren Capacitive Position sensors Piezo-Elektronik Piezo Drivers & Nano- positioning Controllers Hexapod / Mikropositionierung Hexapods / Micropositioning Piezo-Motoren Photonics Alignment Solutions Faserpositionierung Motion controllers Motorsteuerungenen Ceramic Linear motors & Stages Index
S-325 dimensions in mm

Technical Data

ModelsS-325.30LS-325.3SLUnitsNotes see page3-26 Active Axes
X ,
Y , Z
X ,
Y , Z * Open-loop tilt angle @ 0 to 100 V**5**5mrad ±20%* Closed-loop tilt angle-**4mradA3 * Open-loop linear travel @ 0 to 100 V3030µm ±20%A5 * Closed-loop linear travel @ 0 to 100 V-30 µmA6 Integrated feedback sensor-strain gauge sensorB*** Closed-loop/open-loop angular resolution -/0.050.1/0.05µradC1
* For maximum tilt range, allthree piezo actuators must be biased at 50 V. Linear travel and and tilt angle are interdependent. The valuesquoted here refer to purelinear / pure angular motion. See piezo tripod drive equa- tion on page 3-10 for more information.** Mechanical tilt, opticalbeam deflection is twice as large.*** For calibration informationsee p. 3-7. Resolution of PZT tip/tiltplatforms is not limited byfriction or stiction. Noise equivalent motion with E-503 amplifier. *** Closed-loop/open-loop linear resolution -/0.51.0 /0.5nmC1 Electrical capacitance3 x 3.03 x 3.0µF ±20%F1 Unloaded resonant frequency22kHz ±20%G1Resonant frequency with 25 x 8 mm glass mirror11kHz ±20%G3 Distance of pivot point to platform surface6 ±0.56 ±0.5mm Platform moment of inertia515515g · mm
2 Operating temperature range-20 to 80-20 to 80°CH2Voltage connection3 x VL, 2.0 m3 x VL, 2.0 mJ1 Sensor connection-3 x L, 2.0 mJ2 Weight (without cables)6565g ±5% Material casingAlAlLRecommended amplifier/controller G, CH, D(codes explain page 3-9)

3-19