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Catalogue Active Optics / Steering Mirrors High-Dynamics Steering Mirrors

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Physik Instrumente - 40596, 84070, 81215, 2634

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Piezo • Nano

Positioning

Piezo Actuators

Nanopositioning & Scanning Systems

Active Optics / Steering Mirrors

Tutorial: Piezo-electrics in Positioning

Capacitive Industrial position sensors

Piezo Drivers & Nano-positioning controllers

Hexapods/ Micropositioning

Photonics Alignment Solutions

Industrial motion controllers

Ceramic Linear motors & Stages

Index


Technical Data Models	S-303.CDx	S-303.0Lx	Units	Notes see page 3-26
Active axes	Z	Z
Min. Open-loop travel @ -20 to +120 V	3	3	urn ±20%	A2
Closed-loop travel	2	-	urn	A5
Integrated feedback sensor	capacitive	-		B
* Closed-loop / open-loop resolution	0.03 / 0.03	- / 0.03	nm	C1
** Closed-loop linearity (typ.)	0.03	-	%
Full-range repeatability (typ.)	0.7	-	nm	C3
Stiffness			N/um ±20%	D1
Max. (±) normal load	0.5	0.5	N	D4
Electrical capacitance	0.9	0.9	uF ±20%	F1
*** Dynamic operating	50	50	uA/(Hz x um)	F2
current coefficient (DOCC)
Unloaded resonant frequency	25	25	kHz ±20%	G2
Operating temperature range	-20 to 80	-20 to 80	°C	H2
Voltage connection	D	VL		J1
Sensor connection	D	-		J2
Mass	100	30	g ±5%
Body material	Al, Invar optional	Al, Invar optional		L
Recommended Amplifier/Controller	F, M	G, C
(codes explained page 3-9)

* For calibration information see p. 3-7. Resolution of PZT Nanopositioners is not limited by friction or stiction. Noise equivalent motion with E-503, E-710. ** With digital controller, analog controllers will provide a linearity of typ. 1 nm.

*** Dynamic Operating

Current Coefficient in uA per Hz and um. Example: Sinusoidal scan of 1 um at 10 Hz requires approximately 0.5 mA drive current.