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| | | S-303 High-Speed Piezo Phase Shifter (Mirror Translator) with Direct Metrology Option | | |
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| | | of better than 0.1 nanometers. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability. Working Principle / Lifetime S-303 systems were developed for industrial applications where 109 motion cycles or more must be performed without failure or performance loss. The S-303 drive units incorporate PICMA® low-voltage multilayer piezo actuators. These highly optimized and ceramic-encapsulated drives are more robust than conventional piezo actuators, and feature superior lifetime in static and dynamic applications. Since drives and sensors in the S-303 are frictionless and not subject to wear and tear, these units offer an exceptionally high level of reliability. | | |
| | | Ordering Information S-303.0L Piezo Phase Shifter, 3 |jm, Open-Loop S-303.CD Piezo Phase Shifter, 2 |jm, Capacitive Sensor S-303.0Li Piezo Phase Shifter, 3 |m, Open-Loop, Invar S-303.CDi Piezo Phase Shifter, 2 |m, Capacitive Sensor, Invar Ask about custom designs! | | |
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| | | ■ 25 kHz Resonant Frequency for Sub-Millisecond Dynamics ■ <0.1 Nanometer Resolution ■ Capacitive Sensor Option for Highest Linearity and Stability ■ Invar Option for Highest Thermal Stability ■ Aperture with Open-Loop Versions ■ 3 urn Travel Range ■ Compact Size: 30 mm Diameter x 10 mm | | |
| | | Notes See the "Selection Guide" on p. 3-8 for comparison with other steering mirrors. | | |
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| | | S-303 phase shifters are extremely fast and compact systems based on a piezo tripod drive. They offer angstrom level resolution, piston movement up to 3 um with sub-msec response and settling dynamics. The S-303 is designed for mirrors and optics up to 25 mm diameter and can be mounted in any orientation. Open- and closed-loop versions are available. S-303.0L: Open-Loop Z-Positioner The S-303.0L open-loop model is ideal for applications where the position is controlled by an external loop and an external | | sensor. The platform position corresponds roughly to the drive voltage of the piezo actuators. The clear aperture was integrated for transmitted-light applications. S-303.CD: Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors The S-303.CD closed-loop models are equipped with noncontact, zero-friction, direct-measuring two-plate capacitive position sensors and were designed for applications requiring nanometer positioning accuracy and stability. Capacitive sensors are absolute-measuring high-bandwidth devices and exhibit no periodic errors. Unlike conventional sensors, direct metrology measures the position of the platform directly rather than the strain in the actuator or guiding system. It improves phase fidelity and permits motion linearity of better than 0.03 % and effective resolution | | |
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| | | Application Examples | | |
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| | | ■ Interferometry ■ Optical path tuning ■ Beam stabilization ■ Laser physics ■ Cavity tuning | | |
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