PIglide AT3 Linear Air Bearing Stage HIGH PERFORMANCE NANOPOSITIONING STAGE A-123 Ideal for scanning applications or ultra- precise positioning Clean room compatible Customer- specific adaptations can be provided Table size 210 mm × 210 mm Travel ranges 50 mm to 750 mm The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non- contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The noncontact design also makes these stages ideal for cleanroom applications. A high- force linear motor can drive the stage to top speed within a few milliseconds, and the large capacity bearings can support payloads up to 35 kg. The laterally opposed, actively preloaded air bearing design in this model will support normal, vertical, and side- mounted orientations. Multiple encoder options Air preparation kits Single or multi- axis motion controllers and servo drives XY stacks and custom configurations with precision alignment Cable track variations Counterbalance options for vertical (Z) orientations Customizations available Granite bases and vibration isolation systems Specifications Travel Accuracy (3) (with error compensation) Stage Mass © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available

Specifications A-123.xxx Drive System Brushless ironless linear servo motor, 3- phase Feedback System Non- contact optical linear encoder with travel limits and home index Motor Force Constant Continuous Force Peak Force Motor Resistance (phase- to- phase) Motor Inductance (phase- to- phase) Maximum Velocity Maximum Acceleration (1) (unloaded) Maximum Payload Moving Mass External, moving loop Clean (filtered to 1.0 µm or better) – ISO 8573-1 Class 1; Oil- free – ISO 8573-1 Class 1; Dry (-15 °C dew point) – SO 8573-1 Class 3 Hardcoat Aluminum / SS Fasteners (1) Maximum velocity and acceleration...

A-123.500B1 PIglide AT3 Linear Motorized Air Bearing Stage, Travel Range 500 mm, Absolute Encoder (1 nm Resolution, BiSS- C Serial Output), Bus Motor 48 VDC A-123.500C1 PIglide AT3 Linear Motorized Air Bearing Stage, Travel Range 500 mm, Direct Position Measurement with Incremental Encoder (50 nm Resolution A- quad- B (TTL) output), Bus Motor 48 VDC A-123.750A1 PIglide AT3 Linear Motorized Air Bearing Stage, Travel Range 750 mm, Direct Position Measurement with Incremental Encoder (20 μm Grating Pitch, Sine (1 Vpp) Output), Bus Motor 48 VDC A-123.750B1 PIglide AT3 Linear Motorized Air Bearing...

Drawings / Images A-123, dimensions in mm. * Mounting holes symmetric about centre line located at "J" © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

A = 20pm grating pitch incremental, /lotor Wiring Ordering example: standard motor wiring, © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws