NanoScan/BeamScan Scanning Slit Dual Aperture Instrument Operation - Photon Inc - #1

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PHUTUN me 6878 Santa Teresa Blvd. San José, CA95Ï19-1205 Précision Beam Profiling Tel: 408.226.1000 Fax: 408.226.1025 www. pho Ion -i ne. c o m Technical Note NanoScan/BeamScan Scanning Slit Dual Aperture Instrument Opération Elliptical Beam Example Scan Head Uslng feedback from a position encoder, the PLL (phase-locked loop) controlted motor provides précision rotation of the dual orthogonal scan slrts enabling ultra-tlne (up to 0.14 pm) beam sample reso-ution. Aperture 1 beam characterization Light Beam DHiector Drum As tbe scanning slit cuts across the beam. light passes through the aperture lo the detector. Current flow from the detector is proportlonal to the power of the incident light. Current from the detector passes to a high-precision current-to-voltage converter and amplifier. Aperture 2 beam characterization (drum rotation 180°) Thïs measurement is then displayed a graph of précision output voltage vs lime and distance. Scanning Slits Phoion Inc Email beam@photon-irK tom B01060533Û