New Maglev hybrid turbomolecular pump : ATH 3200 M - Pfeiffer Vacuum - #1

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ATH3200M Maglev Turbomolecular Pump SPECIFICALLY DESIGNED FOR PHOTOVOLTAIC APPLICATIONS Alcatel Adixen expands its product range by introducing the ATH3200M, a high flow Maglev turbo-molecular pump offering enhanced performance in ISOF 320 flange. The ATH3200M is designed for vacuum applications that require high pumping speed combined with high gas throughput up to 5000 sccm N2. The performance of this pump makes it suitable for light and harsh processes including 300 mm Semiconductor applications, Flat Panel Display, Photovoltaic, Coating, R/D, Space simulator, etc. User Benefits • Proven robust technology offering high MTBF in all applications. • Compound rotor design for high pumping speed and high fore line tolerance. • Active 5 axis magnetic bearing system offering zero contamination and low level of noise and vibration • Special design reducing maximum transmitted torque . • Compact pump design • Adjustable rotational speed for optimized pumping parameters • Integrated purge gas system and temperature management ensuring upmost resistance to process deposition.