Maglev Turbomolecular Pump - ATH 500M - Pfeiffer Vacuum - #1

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Customer Benefits Applications • Proven robust technology offering high reliability • Compound rotor design that provides high pumping speed with minimum footprint • Adjustable rotational speed for optimized pumping parameters • 5 axis maglev rotor suspension system offering : No contamination Low level of Noise and Vibration Installation in any orientation • High foreline tolerance up to 1.5 Torr • DN100 or DN160 inlet flange connection • CE marked and Rohs compliant • Optical and Mechanical Data Storage • Coating • Electron Microscopy • CVD and PVD • Load lock chambers Alcatel Vacuum Technology offers a new hybrid turbomolecular vacuum pump with the advanced technology of magnetic bearings for medium sized applications. This compact design with integrated control electronics brings the high reliability of 5-axis, mag-lev rotor suspension to the 300 – 500 liter/sec application range on flanges as small as DN100. The ATH500M is compact enough to easily replace most conventional ball bearing turbo pumps of similar pumping speed in embedded applications. Maglev Turbomolecular Pump ATH 500M POWERFUL YET COMPACT DESIGN