Maglev turbo molecular pump : ATP 2300M - Pfeiffer Vacuum - #1

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ATP 2300M Maglev Turbo Molecular Pump MAGLEV TURBO PUMP WITH ENHANCED PERFORMANCE Customer Benefits • Proven robust technology offering high MTBF (>7000 Maglev pumps running) • Maximum H2 performance offering high pumping speed and compression ratio • 5 axis maglev suspension system offering : - No contamination - Low level of noise and vibration - Maintenance free - Installation in any orientation • High foreline tolerance up to 1.5 mbar • Compact pump design (height < 290 mm) driven by standard Magpower controller • Available with embedded electronic controller • Adjustable rotational speed for optimized pumping parameters Alcatel Vacuum Technology expands its product range by introducing the ATP2300M, a high flow Maglev turbopump, offering enhanced light gas pumping. The ATP2300M is designed for vacuum applications that require high pumping speed combined with high gas throughput, up to 3000 sccm N2 . The performance of this pump makes it suitable for both light and harsh applications including Semiconductor Implant and HDPCVD, R/D, Coating, etc.