Low power consumption process pumps : A3P Range - Pfeiffer Vacuum - #1

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A3P range Low power consumption dry pumps for medium applications LOW COST OF OWNERSHIP, COMPACT AND RELIABLE Features Benefits • Designed for low power consumption • Low Cost of Ownership • Compact design • Low footprint • Light for easier installation • Multi-stage roots technology • Temperature control & purge capabilities • High reliability on medium applications • Corrosion resistant • Low noise • Low vibration • Compatible with Semiconductor Fabs requirements • CE & Semi S2 - 0706 compliant Advanced technology for high efficiency Strong from over 20 years of experience in dry pump design for the Semiconductor industry, Alcatel introduces a new range which will dramatically reduce Fab operating costs. Based on Alcatel multi-stage roots design, which remains the best suited technology to achieve the highest performance at the lowest utilities cost, A3P range provides up to 50% energy saving compare to conventional range. A3P includes a wide range of pumping speeds with 3 models, addressing pumping requirements of medium Semiconductor applications. Very compact, A3P range includes the latest features for process compatibility and provides up to 50% footprint reduction compare to conventional range. Applications • All Semiconductor medium applications such as: - Etching (oxide & Poly) - Ashing - Stripping - RTP - Implant