Large dry pumps for harsh process : ADKH Range - Pfeiffer Vacuum - #1

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Proven technology Based on the field proven technology developed over the last 15 years for the semiconductor industry, Alcatel proposes a new high capacity dry pump range able to answer the needs of FPD and Solar harsh process applications as PECVD. This range is composed of 4 versions: AD30KH, AD40KH, AD70KH and AD100KH depending on required pumping speed. Features ADKH series Large Dry pumps for Harsh Processes AD30KH/40KH/70KH/100KH : Advanced Solutions for FPD & Solar industry Benefits High operating temperatures Avoid condensable byproducts inside the pump Compatible with operators based environments Low noise level Field proven special materials High reliability on highly corrosive gases as NF3 cleans Applications : FPD, Solar Optional integrated powder trap High reliability even with large quantities of powder Low maintenance : typical 1- 2 years between overhauls depending on application Low maintenance costs Low energy consumption Low CoO The ADKH range is compatible with Adixen supervision network and predictive maintenance software Increased up-time, lower scrap risks, lower maintenance costs