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Chambers and Components (Part 3.3)

Chambers and Components (Part 3.3)

Product catalog summary

Overview: This document is part of the Vacuum Technology Book, specifically Volume II, Part 3.3, focusing on chambers and components. It provides comprehensive information on vacuum solutions, including sales and service addresses worldwide.

Main Sections:

Vacuum Solutions from a Single Source: Introduction to the integrated approach of providing vacuum solutions, emphasizing the availability of various components and services from a single provider.
Vacuum Chambers: Detailed information on different types of vacuum chambers, their specifications, and applications. This section highlights the importance of selecting the right chamber for specific vacuum processes.
Components: Overview of various components used in vacuum technology, including their functions and compatibility with different systems.
Valves: Description of different types of valves used in vacuum systems, their operational principles, and selection criteria based on application needs.
Feedthroughs: Explanation of feedthroughs, which are essential for maintaining vacuum integrity while allowing the passage of electrical signals or mechanical motion.
Manipulators: Information on manipulators used in vacuum systems to handle and position samples or components within the vacuum environment.

Sales and Service Addresses: The document provides an extensive list of sales and service contacts for Pfeiffer Vacuum and its partners across various countries, ensuring global support and accessibility for customers.

Vacuum Chambers: The document outlines the types of vacuum chambers offered by Pfeiffer Vacuum, including standard, high vacuum, medium vacuum, and modular chambers. These chambers are designed to meet various industrial and research needs, from semiconductor and coating industries to R&D and analytics.

Specifications:

High Vacuum Chambers: Suitable for pressures from ambient to 1 · 10-7 hPa, available in cubical, cylindrical-horizontal, and cylindrical-vertical forms, with sizes ranging from 300 mm to 800 mm.
Medium Vacuum Chambers: Designed for pressures from 1 · 10-5 hPa to ambient, featuring a transparent acrylic glass cover, with sizes from 320 mm to 500 mm.
Modular Chambers: Offer flexibility with a base plate, bell-shaped top, and extension options, suitable for pressures from 10-7 hPa to 500 hPa, based on ISO-K standards.

Applications: The chambers are used in various applications such as analytics, semiconductor, coating, R&D, and more. They are designed to meet high-quality standards and can be customized for specific needs.

Customer Benefits: Pfeiffer Vacuum provides comprehensive services from design to on-site support, ensuring reliable and safe vacuum solutions tailored to customer applications.

Specifications:
The document outlines the specifications for various vacuum chamber components, including flanges, ports, and quick-access doors. The materials used are primarily 304/1.4301 stainless steel, with options for other materials upon request. The pressure range for these components is specified as less than 1 · 10^-7 hPa to 500 hPa over pressure for elastomer seals, and less than 1 · 10^-9 hPa to 500 hPa for metal seals. The temperature range is from -196 to 300 °C.

Procedures:
The document details the production and testing procedures for vacuum chambers, emphasizing high-quality materials and special cleaning procedures to ensure contamination-free surfaces. All production phases are documented and quality tested, with a quality report provided to customers.

Standards:
The components adhere to ISO standards, specifically ISO 2861 and ISO 1609 for flanges. The document also mentions the use of 1.4301 (304) stainless steel for pipes and chamber walls, and 1.4307 (304 L) for CF flanges.

Recommendations:
Custom vacuum chambers can be designed to meet specific customer requirements, with options for additional materials, water cooling, chamber heating, and more. The document suggests that these chambers are suitable for a wide range of applications, including space simulation, leak detection, and air conditioning technology.

Key Data from Tables:
The document includes tables listing nominal diameters and order numbers for various components, such as ISO-K and ISO-F ports, and CF quick-access doors. These tables provide detailed dimensions and order information for each component.

Critical Information:
It is critical to note the pressure and temperature ranges, as well as the material specifications, to ensure compatibility with specific applications. The document also highlights the importance of proper material selection and high-quality production techniques to achieve low outgassing rates and high vacuum stability.

Catalog excerpts

A PASSION FOR PERFECTION PFEIFFER ^^VACUUM

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Vacuum solutions from a single source Know-how book Vacuum generation Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Rotary vane pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Diaphragm vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 Screw pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142 Multi-stage Roots pumps . . . ....

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3.3 Chambers and components / Addresses sales and service Addresses sales Argentina Bermat S. A. Sales Agency Santiago Santiago T +56 2 231 8877 F +56 2 231 4294 [email protected] Scitek Australia Pty. Ltd. Sales Agency/ServicePoint Sydney Sydney T +61 2 9420 0477 F +61 2 9418 3540 [email protected] Hakuto Enterprises Ltd. Hong Kong T +852 2512 5717 F +852 2807 0511 [email protected] SV Vacuumservice Oy Sales Agency Helsinki Helsinki T +358-9-774 55 30 F +358- 9 774 55 330 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 [email protected]...

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3.3 Chambers and components / Addresses sales and service South Africa Pfeiffer Vacuum Benelux B.V. Culemborg T +31 345 478 400 F +31 345 531 076 [email protected] APP Machines Ltda. Sales Agency Bogotá Bogotá T +57 1 704 2311 F +57 1 703 8648 [email protected] Air & Vacuum Technologies (Pty) Ltd. Gauteng T + 27 11 318 3240/5 F + 27 (0)86 522 9188 [email protected] Secotec S.A. Sales Agency Caracas Caracas T +58 212 573 8687 F +58 212 573 1932 [email protected] Macedonia (FYROM) SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected] Spain...

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3.3 Chambers and components / Addresses sales and service Addresses service Argentina Great Britain RUVAC S.R.L. ServicePoint Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. ServiceCenter Shanghai Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 [email protected] Pfeiffer Vacuum Ltd ServiceCenter Livingston Livingston T +44 1506 418000 F +44 1506 418002 [email protected] Hakuto Enterprises Ltd. ServicePoint Hong Kong Hong Kong T +852 2690 2543 F +852 2690 2034 [email protected] Pfeiffer Vacuum...

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3.3 Chambers and components / Addresses sales and service Pfeiffer Vacuum Italia S.p.A. ServiceCenter Agrate Agrate Brianza (MB) T +39 039 6899718 F +39 039 6899718 [email protected] Macedonia (FYROM) APVACUUM Sp.z o.o. ServicePoint Suchy Las, k. Poznania T +48 61 656 35 30 F +48 61 6100312 [email protected] Pfeiffer Vacuum Scandinavia AB ServiceCenter Stockholm Upplands Väsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected] Pfeiffer Vacuum Italia S.p.A. ServiceCenter Roma Pomezia (RM) T +39 335 5284142 [email protected] Malaysia APP Engineering...

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Vacuum chambers Vacuum chambers Vacuum chambers meeting the greatest of demands

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Vacuum chambers Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Overview of series and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Features at a glance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Standard vacuum chambers High vacuum chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 Medium vacuum...

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Vacuum chambers Vacuum chambers Vacuum chambers meeting the greatest of demands At the heart of a vacuum system is the vacuum chamber that has been customized for the application. Pfeiffer Vacuum‘s vacuum chambers meet the highest quality and engineering standards providing vacuum solutions precisely designed to meet our customers‘ needs. They are used for medium vacuum to ultra-high vacuum applications and can also be designed, produced and tested as pressure chambers for overpressure of more than 500 hPa in accordance with the Pressure Equipment Directive (97/23/EC). The range of vacuum chambers...

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Semiconductor Coating Industry Overview of series and applications R&D Vacuum chambers Electron microscopy Leak detection Mass spectrometry Surface analysis Plasma monitoring Residual gas analysis Lithography PVD (Physical Vapor Deposition) CVD (Chemical Vapor Deposition) Plasma etching Implantation – source Implantation – beamline Inspection Bonding MBE (Molecular Beam Epitaxy) Load locks, transfer chambers, handling systems Flat panel displays (FPD) LED / OLED Hard disk coating Photovoltaics Glass coating (PVD) CD, DVD, Blu-ray production (PVD) Optical coating (PVD) Wear protection (PVD, CVD)...

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Temperature range Pressure range Nominal size Vacuum chambers 3.3 Chambers and components / Vacuum chambers TrinosLine standard vacuum chambers High vacuum chambers, cubical with stainless steel door High vacuum chambers, cubical with acrylic glass door High vacuum chambers, horizontal High vacuum chambers, vertical Medium vacuum chambers, vertical with acrylic glass cover Modular vacuum chambers

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3.3 Chambers and components / Vacuum chambers Customer benefits ■ Full service from a single source ■ Vacuum solutions designed precisely for your application

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Vacuum chambers Standard vacuum chambers Standardized chambers for your vacuum applications

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3.3 Chambers and components / Vacuum chambers / Standard chambers Standard vacuum chambers Standard vacuum chambers are standardized shapes where you can select the port types and locations. They can be configured to the vacuum solution you Customer benefits ■ Proven robust design Typical applications PFEIFFERp* VACUUM

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Vacuum chambers 3.3 Chambers and components / Vacuum chambers / Standard chambers Series High vacuum chambers High vacuum chambers are designed for a pressure range from ambient pressure up to 1 · 10-7 hPa. Standardized base bodies are available in three versions. Cubical, cylindrical-horizontal and cylindrical vertical. The nominal sizes range from 300 mm to 800 mm. Medium vacuum chambers Designed for a pressure range from 1 · 10-5 hPa to ambient pressure, the medium vacuum chambers are equipped with a transparent acrylic glass cover. Basic bodies are available in the nominal sizes of 320 mm...

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