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Catalogue MX80 miniature stage series

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Catalog 8092/USA

Miniature Stages

MX80L Miniature Linear motor Stage

Specifications:


			Travel
		25mm	50mm		100mm	150mm
Normal Load Capacity	8kg(18 lb)		8kg(18 lb)		8kg(18 lb)	8kg(18 lb)
Maximum Acceleration
Precision Grade		4g	4g		4g	3g
Standard Grade		5g	5g		5g	4g
Maximum Velocity
5.0\|lm resolution	1100 mm/sec		1500 mm/sec		2000 mm/sec	2000 mm/sec
1.0\|lm resolution	1100 mm/sec		1500 mm/sec		2000 mm/sec	2000 mm/sec
0.5\| m resolution	1100 mm/sec		1500 mm/sec		1500 mm/sec	1500 mm/sec
0.1 \|lm resolution	300 mm/sec		300 mm/sec		300 mm/sec	300 mm/sec
0.02\|lm resolution	60 mm/sec		60 mm/sec		60 mm/sec	60 mm/sec
0.01\|lm resolution	30 mm/sec		30 mm/sec		30 mm/sec	30 mm/sec
Peak Force	12N (2.7 lb)		12N (2.7lb)		24N (5.4 lb)	24N (5.4 lb)
Continuous Force	4N (.9 lb)		4N (.9 lb)		8N (1.8 lb)	8N (1.8 lb)
Duty Cycle		100%	100%		100%	100%
Straightness & Flatness
Precision Grade	4	microns	4 microns		5 microns	6 microns
Standard Grade	6	microns	6 microns		10 microns	12 microns
Positional Accuracy
Precision Grade ^(1)(2)(3)
0.01 \|j.m resolution	3	microns	4 microns		5 microns	5 microns
0.02 \|j.m resolution	3	microns	4 microns		5 microns	5 microns
0.1 \|j.m resolution	3	microns	4 microns		5 microns	5 microns
0.5 \|m resolution	4	microns	5 microns		6 microns	6 microns
1.0 \|m resolution	5	microns	6 microns		7 microns	7 microns
5.0 \|m resolution	13	microns	14 microns		15 microns	15 microns
Standard Grade ⁽²⁾
0.01 \|m resolution	12	microns	15 microns		20 microns	20 microns
0.02 \|m resolution	12	microns	15 microns		20 microns	20 microns
0.1 \|m resolution	12	microns	15 microns		20 microns	20 microns
0.5 \|m resolution	12	microns	15 microns		20 microns	20 microns
1.0 \|m resolution	15	microns	20 microns		25 microns	25 microns
5.0 \|m resolution	25	microns	30 microns		35 microns	35 microns
Bi-directional Repeatability
Precision Grade (¹⁾(²⁾(³⁾
0.01 \|m resolution			+ 0	4	microns
0.02 \|m resolution			+ 0	4	microns
0.1 \|m resolution			+ 0	5	microns
0.5 \|m resolution			+ 1	0	microns
1.0 \|m resolution			+ 2	0	microns
5.0 \|m resolution			+ 10	.0	microns
Standard Grade ⁽²⁾
0.01 \|m resolution			+ 0	8	microns
0.02 \|m resolution			+ 0	8	microns
0.1 \|m resolution			+ 0	8	microns
0.5 \|m resolution			+ 1	5	microns
1.0 \|m resolution			+ 2	0	microns
5.0 \|m resolution			+ 10	.0	microns
Unit Mass
Precision Grade		590g	590g		1027g	1345g
Standard Grade		475g	475g		875g	1125g
Carriage Mass (unloaded)
Precision Grade		282g	282g		509g	676g
Standard Grade		213g	213g		405g	537g

(1) Measured at the carriage center, 35mm above the mounting surface @ 20 C with no load. Unit bolted to granite surface, flat to within 1micron/300mm.

(2) Total accuracy and bi-directional repeatability over full travel (peak to peak).

(3) Precision grade with slope correction value provided. Consult factory if better accuracy is required.

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Parker Hannifin Corporation Electromechanical Automation Division Irwin, Pennsylvania