Text version of the page

Fine Device Bonding System

experts in productivity

TM

Panasonic Factory Solutions Company of America

Plasma Cleaner

• Productivity rates are one-and-a-half times faster than conventional models• Main control boards are lead free

PSX303

MODEL NUMBERPRODUCTIVITYSUBSTRATE DIMENSIONS KXF-927D360 board per hour (when gold is etched 5 nm)50 mm x 20 mm250 mm x 70 mm0.5 mm to 2.0 mm RF parallel electrode typeAr (option:O
Min L x W to Max L x W SUBSTRATE THICKNESSCLEANING METHOD GAS FOR ELECTRICAL DISCHARGEELECTRIC SOURCE PNEUMATIC SOURCE DIMENSIONS
2 ) *
1 1-phase AC 200 V, 4.2 kVA0.49 MPa, 6.5 L/min (A.N.R.)1,764 mm1,045 mm 1,430 mm800 kg
W D H MASS
* 1 If an optional oxygen gas is chosen as a discharging gas, an exhaust-diluting nitrogen gas is also required.note: Please refer to the detail specifications. Chip on Board PSX303