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Spectrum analyzer, Spectrometer, LEED spectrometer, X-ray spectrometer, Scanning tunneling microscope
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Scanning Auger
with Ultimate
Resolution
NanoSAM Lab
• 5 nm SAM Resolution
• 3 nm SEM Resolution
• Depth Profi ling and Charge Neutralisation
• Additional Techniques: EBSD, SEMPA, FIB, EBL
NanoSAM Lab 530-V01/Oct.06
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