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| № Omicron :_Nano Technoloqy | |||||||||||||||||||||||||||||||||||||||
| MSLAB 103-V05/10.04 | |||||||||||||||||||||||||||||||||||||||
| MULTISCAN STM - | |||||||||||||||||||||||||||||||||||||||
| The New Stage for the MULTISCAN LAB™ | |||||||||||||||||||||||||||||||||||||||
| Increased complexity of today's applications requires high-resolution structural and chemical analysis of nanometer-scaled structures. The integral combination of different analysis technologies is the key to gain complementary information of the very same sample area. | |||||||||||||||||||||||||||||||||||||||
| MULTISCAN LAB™: Complete UHV system solution with UHV Gemini Column and NanoSAM. | |||||||||||||||||||||||||||||||||||||||
| This goal is ideally achieved with the new goniometer-mounted MULTISCAN STM, i ntegrated in the MULTISCAN LAB™. To allow optimal and simultaneous SEM and SAM operation together with SPM under different rotation angles, a new scanner design was developed. The SPM fits into the small gap between sample and | SEM column with 8 mm working distance. Although the scanner is ultra compact, it offers a scan range of 6 x 6 x 1.5 urn in XYZ, while meeting all stability criteria of a state-of-the-art SPM. Moreover, the rigid design also enables the use of a spring loaded sensor exchange with a non-magnetic tip carrier, avoiding magnetic stray fields for | ||||||||||||||||||||||||||||||||||||||
| unsurpassed low energy SEM performance. This makes the new MULTISCAN STM an ideal partner for the UHV Gemini Column. The low beam energy performance and ultimate resolution below 3 nm offers unsurpassed SEM capabilities and makes SPM work efficiently with SEM assisted probe navigation. Chemical analysis is pushed to previously unknown limits by the introduction of the NanoSAM energy analyser, enabling Scanning Auger Microscopy resolution below the 10 nm benchmark. | |||||||||||||||||||||||||||||||||||||||
| The new MULTISCAN STM: | |||||||||||||||||||||||||||||||||||||||
| l r | 1-v~- . UHV-GeminiColumn | ||||||||||||||||||||||||||||||||||||||
| I NanoSAM EA | |||||||||||||||||||||||||||||||||||||||
| 8mm | |||||||||||||||||||||||||||||||||||||||
| _^ | |||||||||||||||||||||||||||||||||||||||
| MULTISCAN STM Stage | |||||||||||||||||||||||||||||||||||||||
| Side view of the MULTISCAN STM with UHV Gemini Column and NanoSAM energy analyser. | |||||||||||||||||||||||||||||||||||||||
| The goniometer-mounted MULTISCAN STM with UHV Gemini Column and NanoSAM energy analyser. | Schematic with 25° tilted MULTISCAN STM. | ||||||||||||||||||||||||||||||||||||||
| Omicron NanoTechnology GmbH www.omicron.de | |||||||||||||||||||||||||||||||||||||||