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P. 02
P. 03
P. 04
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P. 08
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Scanning tunneling microscope, Scanning electron microscope, Microscope, XPS spectrometer, Spectrum analyzer
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| Manipulator | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Sputtering | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Preparation | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| with in-situ characterisation using LEED or RHEED in the MULTIPROBE XP. The MULTIPROBE RM has a research MBE chamber which offers compatibility with up to five evaporation sources on a cluster flange, RHEED, and a LN2 cooling shroud. Again, custom designs are also possible, and many non-standard facilities have already been built, including reaction chambers, laser ablation, cleaving stations, vacuum suitcases etc. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| A selection of standard preparation chambers provide unrivalled in-situ preparation facilities ranging from the standard sample preparation techniques and thin film growth, sputtering and annealing offered by the MULTIPROBE P to advanced preparation techniques including thin film growth | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Evaporators | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Preparation Chamber (P) | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Manipulator RHEED Screen Load Lock | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| MULTIPROBE Compact The MULTIPROBE Compact is the smallest true multi-technique system available, and is a powerful entry-level system with single analysis chamber and load lock. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Sputtering | Evaporators | |||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Extended Preparation Chamber (XP) | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Standard MULTIPROBE The standard MULTIPROBE system variants S, P, XP and RM demonstrate Omicrons successful concept of combining atomic resolution UHV SPM with a comprehensive range of complementary multi-technique surface analysis and sample preparation techniques. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| LN2 Cooling Shroud RHEED Screen with Manipulator | Film Thickness | |||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Sputtering Monitor | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| MULTIPROBE MXPS The MULTIPROBE MXPS offers an alternative analysis module compatible with an x-ray monochromator. It fits exactly into the modularity of the MULTIPROBE concept and is available in the same P, XP, and RM variants. SPM-PROBE , The SPM-PROBE consists of a main SPM chamber equipped with extra flanges for auxiliary techniques, thus forming an ultra-compact, stand-alone UHV SPM workstation. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| RHEED Gun Cluster Flange Sample Transfer with Sources | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||