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View inside a MULTIPROBE system showing multi-technique capabilities and chamber fl exibility.

MULTIPROBE S - 20757 Basics of the MULTIPROBE System

Bench & Chambers Sample Heating / Cooling

A combination of a rigid bench construction and optional air damping legs are the ele- mentary basis and guarantee for ultimate SEM/SAM or SPM resolution. All chambers are made of either non-magnetic stainless steel or Mu-metal for effi cient magnetic shielding. The analysis chambers provide suffi cient fl anges for upgrades of the system with ad-ditional analysis techniques. Standard sample manipulators have x,y,z travel and primary rotation and are fi tted as standard with a resistive pyrolytic boron nitride sample heater for temperatures up to >900°C. Many options are available like e.g. secondary rotation (azimuthal) or tilt. Further sample heat- ing options permit direct current heating of semi- conductors up to >1200°C, or e-beam heating (up to> 1100 °C) for metals. LN
2 and LHe cryogenic options are also available.

Bake Out Pumping Confi guration

MULTIPROBE systems are equipped with a unique system and bakeout controller that allows simple and easy handling of the complete vacuum system including the operation of pumps, valves, vacuum interlocks and bakeout. The programmable and inter- locked bakeout guarantees system safety and ease-of-operation. An electropneumatic gate valve on the turbomolecular pump protects the chamber from backstreaming in the case of power failure. Rigid and easy to assemble bakeout panels speed up the bakeout pro- cedures. The standard pumping confi guration uses turbo-molecular, ion getter and titanium sublimation pumps to achieve a guaranteed base pressure of
-10 mbar. The high backing pressure of the drag-type Turbomolecular pumps simplify user-operation, whilst the standard rotary-type backing pump speeds up system pump-down. Standard pumping options are also available for e.g. oil-free environments (scrolls backing) and for in-situ aggressive gas dosing, and can be tailored to specifi c experimental needs. 3
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