Text version of the page

Technical Data / Features

Fully UHV compatible Bakeable to 180°CWeight: ≤ 300 gMax. step size: 400 nm ± 15 % Min, step size: 40 nm ± 15 %Standard deviation of single step:

integrallateral run-outdifferentialdirection of travel

≈ 25 gTotal movement: 5 mm ± 0.2 mm Tractive force: > 0.5 N, slip Differential and integral lateral run-out of a MS 5 Micro Piezo Slide. Dimensions of a MS 5 Micro Piezo Slide. Connection of up to three MS 5 units with MSCU control unit and PC.
1015 36101010 7 Dimensions in mm LogicPower SupplyRelays Step TimerClock Pulse X-axisY-axisZ-axisMS 5 units
Z+ Z - Remote Control Your local partner:

MS5 & Control Unit - 20757 How to contact us:

Headquarters: Omicron NanoTechnology GmbHLimburger Str. 75 • D-65232 Taunusstein • Germany Tel. +49 (0) 61 28 / 987 - 0 • Fax +49 (0) 61 28 /0 987 - 185 www.omicron-instruments.com or www.omicron.de
Specifications and descriptions contained in this brochure are subject to alteration without notice. 810-V07/11.06Printed by Druckerei und Verlag Klaus Koch GmbH