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Headquarters: OMICRON VAKUUMPHYSIK GMBHIdsteiner Straße 78 ? D-65232 Taunusstein ? GermanyTel. +49 (0) 61 28 987 - 0 ? Fax +49 (0) 61 28 987 - 185www.omicron-instruments.com or www.omicron.de

UK: USA: TAIWAN: AUSTRALIA:
OMICRON SURFACE SCIENCE LTD Tel. 01342 331000 ? Fax 01342 331003 OMICRON ASSOCIATES Tel. (412) 831-2262 ? Fax (412) 831-9828 OMEGA SCIENTIFIC TAIWAN LTD. Tel. (02) 8780-5228 ? Fax (02) 8780-5225 THOMSON SCIENTIFIC INSTRUMENTS PTE LTD Tel. (03) 9663 2738 ? Fax (03) 9663 3680 FRANCE: USA (WEST): SINGAPORE: BRAZIL:
OMICRON EURL Tel. 04 42 50 68 64 ? Fax 04 42 50 68 65 OMICRON ASSOCIATES, W. REGION OFFICE Tel. (303) 893 2388 ? Fax (303) 893 2399 RESEARCH INSTRUMENTS PTE LTD Tel. 775-7284 ? Fax 775-9228 BOC DO BRASIL LTDA Tel. (011) 38580377 ? Fax (011) 39652766 ITALY: JAPAN: INDIA:
OMICRON VAKUUMPHYSIK GMBH, ROMA Tel. (06) 35 45 85 53 ? Fax (06) 35 40 38 67 ULVAC-PHI, INC. Tel. 0467 85 6522 ? Fax 0467 85 4411 MACK INTERNATIONAL Tel. (022) 285 52 61 ? Fax (022) 285 23 26 SWEDEN: SOUTH KOREA: CHINA:
CRYSIS TECHNOLOGY AB Tel. 013 212151 ? Fax 013 212147 WOOSIN CRYOVAC LTD Tel. (02) 598-3693 ? Fax (02) 597-5615 OMICRON CHINA OFFICE Tel. (010) 82073793 ? Fax (010) 82070995

EKF 1000 - 20757 Specifications

285 Port aligner ± 2°Z-shift *With optional z-shiftand port aligner All dimensions in mm 42*(-92)40*203*
Ø 34 15

Electron source EKF 1000: Electron source power supply NGE 52: Minimum spot size: 5nA and 5kVMaximum scan area:> 5 x 5 mm Beam energy:0.1 - 5 keVBeam current monitor:20 nA to 50 µA Beam blanking control input:TTLStatic beam deflection:± 2.5 mmHigh stability HV, and emission regulated filamentsupply, monitor outputs for beam current/beam energy.

2

(with SCU)Beam energy:100 eV - 5 keVMaximum beam current:>10 µAFilament type:LaB

6

SCU scan control unit: Magnetic shielding:µ-metal (stainless steelcylinder for µ-metal chambers)Flange to sample distance:285 mmWorking distance:15 mm Mounting flange:NW 35 CF (2¾" OD)Max. bakeout temperature:250 °C Scan control unit with front panel control of scan width, beam shift, line scan, spot mode, and tracking facility. Scan is switch-able between internal TV-scan genera- tor and external scan input from PC-board. Includes SED-video signal conditioning with brightness/contrast adjustment for PC interface and TV-monitor (PAL, NTSC) video outputs.

V01/02.2001