EFM 2 - OMICRON - #8

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How to contact us
Headquarters: Omicron NanoTechnology GmbH Limburger Str. 75 • D-65232 Taunusstein • Germany Tel. +49 (0) 61 28/987 -0 - Fax +49 (0) 61 28 / 987 - 185 Web: www.omicron.de or www.omicron-instruments.com e-mail: info@omicron.de
ASIA &AUSTRALIA Japan:
ULVAC-PHI, Inc.
Tel. 0467 85 6522 • Email: salesjp@phi.com South Korea:
Woosin CryoVac Ltd. • Tel. 031 457 5615 Email: woosin@woosinent.co.kr Taiwan:
Omega Scientific Taiwan Ltd. • Tel. 02 8780 5228
Email:omega001@ms3.hinet.net
Singapore:
Research Instruments Pte. Ltd.
Tel. 6775 7284 • Email: info@ri.com.sg
India:
Mackinternational
, Tel. 022 2285 5261 • Email: macktran@vsnl.com J China:
Omicron China Office • Tel. 010 8286 7920
Email:germtech@public3.bta.net.cn
Australia:
Thomson Scientific Instruments Pty Ltd. Tel. 03 9663 2738 • Email: tsi@tsi.com.au
EUROPE w^^^^^^^P^B* UK:
Omicron NanoTechnology Ltd. Tel. 01342 33 1000 • Email: info@omicron.co.uk France:
Omicron NanoTechnology • Tel. 0442 50 68 64 Email:omicron.nanotechnology@wanadoo.fr Italy:
Omicron NanoTechnology GmbH, Roma Tel. 06 35 45 8553 • Email: omicron.italia@tiscali.it Sweden:
Rowaco AB
Tel. 013 138 010 • Email: kristian@rowaco.se
AMERICA
North American Offices:
Omicron NanoTechnology USA
Tel. 952 345 5240 • Email: info@omicronUS.com
North American Offices (North East Regional Office):1
Omicron NanoTechnology USA
Tel. 724 942 9821 • Email: f.henn@omicronUS.com
North American Offices (West Regional Office):
Omicron NanoTechnology USA
Tel. 303 893 2388 • Email: b.gerace@omicronUS.com
North American Offices (South East Regional Office):
Omicron NanoTechnology USA
Tel. 704 655 8530 • Email: d.laken@omicronUS.com
50
40
30
Deposition Areas and Crucible Temperatures
20
«a:Srm^rUjre *3 mm aperture
10
0 50 100 150 200 250 300
Nozzle-sample distance (mm)
Deposition area as a function of distance for three different aperture sizes for EFM 3, EFM 4 and Triple EFM.
small ■ medium
large
-600 VHighvoltage .800 V ■ 1000 V
2000
1500
EFM 3:
Flat top diameter 10 mm
(Nozzle - sample distance 90 mm, Mo-cruclble 8 mm diameter) EFM 4:
Flat top diameter 36 mm
(Nozzle - sample distance 90 mm, Mo-cruclble 8 mm diameter) EFM 6:
Flat top diameter 50 mm,
(Nozzle - sample distance 40 mm, Mo-cruclble XXXL)
1000
0
50 100 150 200 250 300
Heating power (W)
Crucible temperatures for different crucible sizes with three typical e-beam energies. For this measurement Mo-crucibles were used.
EFM 700-V03/10.05 Printed by Druckerei und Verlag Klaus Koch GmbH
Specifications and descriptions contained
in this brochure are subject to alteration without notice.

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