Precision Polished Substrates - Ohara - #1

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Ohara is a world class manufacturer of precision polished quartz, fused silica and optical glass substrates. Our facility uses double-side lapping and polishing machines to produce high quality plano substrates with extremely low surface roughness and flatness values. Some of the uses for our polished substrates include photomask substrates, TFT plates, phase masks and LCD's. Type of materials - quartz, fused silica, optical glasses, etc. Polished substrates available from 25 to 360 mm diameter 5" and 6" Sq. Photomask Substrates & custom sizes RMS Values ~ 2 Angstroms (via AFM) Flatness Values ~ 1 micron (via Tropel Flatmaster) Substrates suitable for use at 248 nm Class 100 Clean Room and Megasonic Cleaning Unit Excellent Metrology Capabilities ADVANTAGES DESCRIPTION O H A R A C O R P O R AT I O N www.oharacorp.com Precision Polished Substrates