Glass Disks for Flying Height Testers (GD-FHT) - Ohara - #2

Text version of the page

O H A R A C O R P O R AT I O N 23141Arroyo Vista #200 Rancho Santa Margarita, CA 92688 Tel: (949) 858-5700 www.oharacorp.com Fax: (949) 858-5455 50 Columbia Road Branchburg, NJ 08876 Tel: (908) 218-0100 Fax: (908) 218-1685 Glass Disks for Flying Height Testers (GD-FHT) GD-FHT Properties (1) Fomblin® is a registered trademark of Ausimont. (1) Measured via Zygo New View, no filter, scan field 2.8 x2.1 mm, average of data at R30 and R40 for both sides. (2) Measured via Zygo New View 5020, 0.2-1.5 mm band pass filter, scan field 5.68 x 4.27mm. Mag. x2.5, image zoom x0.5, data is average of both sides of disk (3) Measured via AFM 5X5 ìm with OD 91 mm. 400 500 600 700 2.45mmt 89.8 91.4 91.6 92 2.76mmt 89.8 91.3 91.6 92 4.35mmt 88.5 90.9 91.3 91.6 6.44mmt 87.4 90.7 91.3 91.6 436nm 486nm 546nm 588nm 633nm 656nm Wavelength nm Transmittance (%) Refractive Indices 1.539 1.534 1.530* 1.528 1.526* 1.525 * Calculated Value n=0.00482/ë2+1.51362 n: Refractive index ë: Wavelength ìm GD-FHT Surface Specifications Type RZ (1) Wa (Ref. only) (2) Target Rmax (3) Target Rrms (3) Outer Diameter mm Inner Diameter mm Concentricity ìm Roundness of inner Diameter ìm Parallelism ìm Flatness ìm Conventinal N/A ~5Å Lower Wave 6.5 nm ~2Å Super Low Waviness 5.5 nm 2.5 - 4ìm 0.5 nm 48.0 - 133.0 5.0 - 10.0 5.0 - 10.0 5 - 10 5 - 10 0.5 Electrical Properties Mechanical Properties Thermal Property Properties Volume Resistivity* (Ù.m) Surface Resistivity*** (Ù.o) Half Decay Period*** (s) Abrasion** Young’s Modulus (GPa) Bending Strength (MPa) Poisson’s Ratio CTE (10-7/K) GD-FHT Conventional Products S-BSL7 Fused Silica 1.1x109 4.4x1012 8.9 53 82 107 0.22 33 1.0x1013 1.0x1015 >30min 94 80 64 0.21 72 1.0x1017 8.6x1014 >30min 59 71 69 0.17 5.5 * Measured at 20degC and humidity 60% according to JIS K 6911. ** Measured according to Japanese Optical Glass Industrial Standards (JOGIS). *** Measured referring to JIS L 1094 (OHARA’s original method). Half decay period shows the time that relative charging voltage is halved. S-BSL7 and synthetic fused silica require more than 30. Properties subject to change without notice. Please contact us to discuss your specific requirements. Special Disk Surface Applications Item Description Specification Lubricant Fomblin® Z DOL 4000(1) Thickness of 10 ±2 Å Anti Reflective Coating V-Coat 275 R < 0.05% at 650-665nm R < 0.05% at 658 nm (nominally centered) Angle of Incidence = 0°