General - OAI - #4

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Microfluidics and Micro TAS UV Ozone Treatment System Improves surface adhesion.  UV Ozone Treatment Systems available for R&D through production  Super low pressure lamps for improved surface treatment  Improves bonding for polymer and glass  Improves yield Model 30 Collimated UV Lightsource Modular unit can be used as a stand alone or integrated into almost any mask aligner or exposure system.  Available with near, mid and deep UV  Power up to 10KW  Pictured with optional stand  Model 200 Mask Aligner System Manual, table top Contact Mask Aligner.  Flexible - fast, easy change of substrate & mask holder  Substrates up to 8”  Entry level price point  Available with near, mid and deep UV  Optics and holders available for small substrates  Can be configured with an OAI CLiPP microfluidic module  Filter holder and a wide range of filters available  Contact Liquid Polymer Process (CLiPP) Designed for microfluidic device production  Designed for single or multi-dimensional devices  For use with readily available liquid UV photopolymers  Controlled hydrophobic or hydrophilic surfaces and channels  CLiPP modules can be fitted to any OAI mask aligner   Fill chamber with monomer mixture. Add binary photomask Expose with collimated flood exposure source 365 - nm Remove uncured monomer Adjust cavity for subsequent layer Fill channels with sacrificial material CLiPP Fabrication: Methodology for Microfluidic Prototype and Production Devices Any OAI mask aligner system may be configured with an optional OAI Nano Imprint Module