| | | Encoders that report the position in drive systems, especially in linear drives, are often presented with contradictory demands, such as high resolution, high accuracy, compact size, low mass, and fast measuring speed. ■ High path resolutions within the controller are necessary to achieve the high servo amplification required by highly-dynamic digital drives that can follow the finest contours without oscillations. | | The LIA encoders from NUMERIK JENA are equipped with features that fulfill these high requirements in an ideal manner. Therefore, encoders are available for a broad range of applications. ■ The new interpolation circuitry, with subdivision factors of up to 100, is integrated in the 15-pin D-sub connector or in the scanning head, and makes resolutions down to 0.05 um possible without any additional electronics. ■ The permissible traversing speed was raised to 10 m/s for sinusoidal signal output, and to 1.6 m/s for square wave signal output, with a resolution of 0.1 um. ■ The short-range position errors (interpolation errors) were significantly reduced by introducing an electronic compensation of amplitude and offset deviations of the coarse signals. This compensation functions without following error in all velocity ranges. Such deviations are caused by mounting errors and scale contamination, for example. ■ The physical mounting is made easier by use of an LED, whose brightness gives information about the adjustment status of the scanning head. | | |
| | | The graduated scale is definitive for the quality of a linear encoder. Requirements for maximum position deviations of ± 2 urn per meter or less are no rarity. The emphasis is mostly on the avoidance of short-range errors, since long-range errors, mostly linear error components, can often be compensated. The concentration of multiple axes in motion in very tight spaces, such as in semiconductor-producing machines, requires the miniaturization of the drives, guideways and encoders. High machining speeds and therefore high accelerations make low masses of the components in motion essential. | | |
| | | Other features are: ■ Reference signal(s) with repeatability accurate to a specific increment, regardless of the direction from which the reference mark(s) is/are traversed ■ Optional, additional optical switching sensor(s) integrated in the scanning head (LIA 21 ; LIA 22) ■ Compact size ■ Large mounting tolerances ■ High resistance to contamination Areas of application ■ Production and inspection machines for the semiconductor industry ■ Linear units and drives ■ Coordinate tables ■ Measuring machines and measuring microscopes | | |