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XTRAKPlasma Treatment System

TM

XTRAK Plasma Treatment System - 18446 March

® A NORDSON COMPANY The XTRAK provides maximum performance and flexibility for surface treatment of electronic devices. With itsinnovative handling system, the XTRAK is ideal for applications such as adhesion promotion and contamination removal in a highly automated, in-line manufacturing operation or island configu- ration. MULTIPLE PLASMA MODE CAPABILITY The system can be configured for direct, downstream and downstream ion-free plasma.Unique to the industry, the XTRAK can be configured in thedownstream ion-free mode - removing ions, electrons andphotons, enabling the chemically active radicals and byproducts to perform the work using oxygen as thesource gas. The patent-pending XTRAK-IFPsystem is ideal forcleaning pre-programmed memory devices when UV expo- sure may be an issue. Multiple plasma modes allow unre- stricted choice of any process gas. SMART TUNE™ MANAGEMENT SYSTEM The XTRAK’s SMART Tune management system provides closed-loop plasma control that optimizes the RF system and minimizes tuning time. The system automatically recycles to a plasma-ready state, compensating for changes in vacuum pressure, temperature and varied lot sizes. Maximum power to the chamber is achieved with a proprietary algorithm that constantly measures forward and reflective power inside the chamber. standalone configuration. It can also run in an island form- factor to feed a designated line of equipment, including component attach systems, wire bonders and dispense equipment. FEATURES AND BENEFITS Fast, efficient surface treatment and cleaning prior towire bonding, die attach, encapsulation, conformal coating, underfill and more INNOVATIVE HANDLING AND CONFIGURATION The XTRAK’s flexible architecture accommodates a wide variety of products, such as single strips, process carriers, and larger, heavier components. Two-strip handling is also available for 6-inch (length) strips or smaller. Product handling reliability and control are ensured with a servo- driven handling system with soft deceleration.The system operates in both automatic and manual modes,with a multi-processing feature that allows implementation of single or multiple recipes in one operation. By integrating the XTRAK system with loaders, the XTRAK operates in a Uniform plasma treatment across all part surfaces with its three-axis symmetrical chamber design Proprietary software control with intuitive graphical interface for easy touch-screen programming Ultimate application flexibility for direct, downstream and downstream ion-free plasma treatment Full front access to all interior components allows forconvenient maintenance