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PM-100Plasma Treatment System

PM-100 Low-Cost Plasma Cleaning System - 18446 March

® A NORDSON COMPANY

Leading Plasma Innovations

The PM-100 plasma system is designed to provide advanced plasma treatment capabilities at low capital cost. The system is suitable for R&D centers, universities, and laboratory facilities, who will find the PM-100 plasma system the perfect fit for their plasma needs. APPLICATIONS – Electronic & Medical Device Processing Gas plasma treatment provides a fast, efficient method for surface modification and cleaning prior to: wire bonding, die attach, encapsulation, conformal coating, printing and other processes. Plasma processing increases wettability, improves lubricity, enhances bonding and adhesion strength, promotes underfill adhesion, and enables deposition of bio-compatible materials. CHAMBER The plasma chamber is constructed of high-quality quartz that is resistant to chemicals and easy to clean. It’s designed to provide the most efficient plasma processing with the short cycle times. SAFETY Standard safety features include an emergency shut-off button (EMO button) that terminates gas flow and RF power input. Safety interlocks prevent activation of RF power and gas flow when the chamber door is open. The system is CE marked and compliant. PROCESS CONTROL The system’s control module monitors chamber pressure and power level. Up to two (2) process gasses can be connected to a gas control manifold (GCM) that provides process recipe flexibility. The controller provides automatic operation, is user- friendly, and ensures precise, reproducible process conditions. THE PM-100 PLASMA SYSTEM IS IDEAL FOR: BGAs LED & FPD devices Hybrid devices Lead frames 2 Gas GCM Optical components Multi-chip modules POWER and MATCHING NETWORK Flex/Rigid circuit panels Plastics & Ceramics Different plasma applications require different RF power settings. The PM-100 plasma system is equipped with an automatic impedance matching network for ease of operation and consistent results. RF power is available up to 300 Watts. Solar Cells PV devices Medical devices Automotive parts Catheters Ocular implants