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FP64Plasma System

FP64 Plasma Treatment System - 18446 March

® A NORDSON COMPANY

Effective plasma treatment in a cost and space efficient system.

March Plasma Systems’ FP64 systems are specifically configured to meet flex panel production requirements. Daily operating expenses, such as the process gases and power consumption, are minimized through unique design concepts. The FP64 system is a cost and space efficient plasma system for innerlayer processes and flexible panel formats.The FP64 platform is completely self-contained, requiringminimal floor space. The pump, chamber, control electronics, and 13.56 MHz power supply are housed in a single enclo- sure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal. Small Footprint Horizontal Loading of Flex panels Simple, One-Button Operation Easy Programming Proven, Robust Technology Cleaning and Surface preparation
March FP64 Plasma System The FP64 system is specifically designed to deliver superior performance for flex panel cleaning and surface preparation applications. The efficient use of space saving horizontal electrodes allows for batch loads of 16 panels per cycle. March systems are designed to maximize plasma efficiency through the use of proprietary power matching and control system algorithms.The FP64 system’s fast cycle rates are achieved through anefficient vacuum pumping system and cool running elec- trodes. The use of Oxygen and/or Argon process gases makes the systems easy to install in virtually any production location.The intuitive touch screen control panel gives continuousupdates on process status. The control system can be password protected at multiple levels to prevent unauthorized recipe modification. This ensures the consistent performance of the FP64 system.The horizontal electrode shelf configuration makes loadingand unloading the FP64 system very easy.A very significant feature of the FP64 system is the very compact and service friendly design. The system features avery small footprint and is designed for complete service access from the front and rear of the machine only. Multiple systems can be placed side-by-side without any floor space penalty. Features and Benefits
Simple operation Specific design for cleaning andsurface preparation for Flex Proprietary electrode design provides maximum treatment performance Easy loading and unloading Compact system enclosure minimizes footprint Lower operational costs with no hazardous waste disposal