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March®
A NORDSON COMPANY
SUPERIOR PLASMA TECHNOLOGY FOR HIGH THROUGHPUT STRIP PROCESSING
FlexTRAK-SH
Plasma Treatment System
TM
HIGH THROUGHPUT PROCESSING
The FlexTRAK-SH system’s integrated strip handling system
provides rapid material transfer for a wide range of strip sizes,
up to 5 strips per cycle. Processing can be done from most
types of magazines and carriers. The patented chamber
design and control architecture enable short plasma cycle
times with very low overhead, ensuring that throughput is
maximized and cost of ownership is minimized.
FEATURES AND BENEFITS
• Highly uniform plasma with maximized treatment rates
• Production-ready strip handling
• High machine autonomy
• Service components accessible via front pull-out shelves
• High throughput and low cost of ownership
The FlexTRAK-SH system is designed for high-throughput
processing of lead-frame strips, laminate substrates, and
other strip-type microelectronic components, up to 5 strips
per cycle. The patented plasma chamber design provides
exceptional uniformity and process repeatability. Its threeaxis
symmetrical chamber ensures all areas of the strip are
treated uniformly, while tight control over all process
parameters ensures highly repeatable results.
The universal architecture of the FlexTRAK-SH system
accommodates a wide range of strip sizes in the same
system, yielding unmatched production flexibility. Its small
chamber volume and proprietary process control system
provide short cycle times, with high machine autonomy.
APPLICATIONS
Plasma processes for die attach, pre-wire bond,
pre-mold and post-mold.
Contamination Removal & Cleaning
• Fluorine & other halogens
• Metals & metal oxides
• Organic compounds
Etching
• Modify strip to improve die adhesion
• Modify surface of bonded die & strip to improve
mold material adhesion and reduce delamination
Surface Activation
• Improve die adhesive flow to eliminate voids
and enhance adhesion
• Improve mold material flow to eliminate voids
and reduce wire sweep
• Improve underfill to eliminate voids, enhance
adhesion, increase wicking speed and maintain
uniform fillet height
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