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FlexTRAKPlasma Treatment System

TM

FlexTRAK Plasma Treatment System - 18446 March

® A NORDSON COMPANY

Superior plasma process quality and automation in one system

The March TRAK series of gas plasma equipment provides unparalleled treatment uniformity and process consistency. A three-axis symmetrical chamber ensures all positions of the product are treated uniformly, while tight controls over all process parameters ensure repeatable results from product to product.The FlexTRAK™ is the latest addition to the March TRAKseries, and is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assort- ment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space require- ments. HIGH-THROUGHPUT PROCESSING CAPABILITY The FlexTRAK system handles a wide variety of product form factors, including boats, carriers, Jedec/Auer
® boats, strips,laminates and wafers. Depending on throughput and product form requirements, the system can be configured for maga- zine-to-magazine processing of single and multiple strips or lead frames, reel-to-reel, wafer processing, and standalone for island-based production environments. FEATURES and BENEFITS SMART TUNE™ MANAGEMENT SYSTEM Easily integrates with a variety of process equipment,including wire bond, die attach, dispense, mold andmarking equipment. The FlexTRAK’s SMART Tune management system provides closed-loop plasma control that optimizes the RF system and minimizes tuning time. The system automatically recycles to a plasma-ready state, compensating for changes in vacuum pressure, temperature and varied lot sizes. Maximum power to the chamber is achieved in seconds with a proprietary algorithm that constantly measures forward and reflective power inside the chamber. Ultimate application flexibility for direct, downstreamand ion-free (patent-pending) plasma which allowstreatment without exposure to the direct plasma glow discharge. A compact, three-axis symmetrical chamber andproprietary process control for unmatched processuniformity. INTUITIVE SOFTWARE AND GRAPHICAL INTERFACE March’s proprietary software and intuitive graphical interface allow easy touch-screen programming. An unlimited number of alphanumeric recipes can be saved and instantly accessed. The FlexTRAK™ platform is Ethernet, Internet- and LAN-ready. Real-time process representation allows statistical data gathering. Industry-leading throughput capacity with shortcycle times . A unique, slim structure that requires minimal floorspace. All service components are easily accessiblefrom the front.